Nanoscale measurement of cylinder surfaces of tribo-elements using a laser scanning interferometry with a wide field of view

在前期的研究中，我们研制出了一种视场广阔的新型激光显微镜。在分辨率和视野之间有一个权衡。为了获得较宽的视场，我们牺牲了激光显微镜在深度方向上的分辨率。为了实现对圆柱形物体整体形状的纳米级测量，将双光束干涉法引入到宽视场激光显微镜中。在各种形式的干涉测量中，双光束干涉测量在原理和实践上都特别简单直接，因此应用范围广泛。在这项工作中，我们借助参考平面获得了整个圆柱体表面的干涉图像。结果可以得到整个圆柱体表面的条纹图案。通过对条纹图案的图像处理，我们在纳米尺度上计算了圆柱体的表面轮廓。

In a previous study, we have developed a new type laser microscope with a wide field of vew. There is a trade-off between the resolution and the field of view. We sacrificed the resolution of the laser microscope in the depth direction to get the wide field of view. To achieve a nano-level measurement of the whole shape of a cylindrical object, two-beam interferometry was introduced to the laser microscope with wide field of view. Among the various forms of interferometry, two-beam interferometry is especially simple and straightforward in principle, as well as practice, and is therefore utilized for a broad range of applications. In this work, we have acquired interference images of the whole cylinder surface with the aid of a reference flat. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the surface profile of the cylinder on a nano scale.