Measurement of Tooth Fom Deviation of Gear-Shaped Tools by Laser Interferometry

（1）以剃齿刀为对象，采用大入射角激光干涉法测量齿轮齿形刀具的齿面形状偏差。（2）目标测度中存在的问题：（1）如何在剃齿刀的齿面的干涉条纹图案上分离脊和槽的区域，（2）如何将从干涉条纹数据的亮度数据获得的不连续相位转换为连续相位数据，以及（3）随着入射角的增大，在光束入射侧的面宽方向上，槽脊和沟槽图像的宽度减小，在该地区。(3)To为了解决上述问题，介绍了上述各项的算法，并提出了一种新的数据处理方法，使剃齿刀的形状偏差可以在被测齿面的整个区域内得到。(4)As对内齿形砂轮形位误差测量方法进行了理论研究，在平面试件上粘贴砂纸，并在试件表面涂上不同直径的氧化铝粉末。而大角度入射的激光束照射被测表面时，有几个入射角度的表面都没有反射光。

(1)Form deviation of tooth flank of a shaving cutter as objective with gear tooth-shaped tool was measured by the interferometry method using laser beam with large incidence angle.(2)Some problems on measuring the objective are follows : (1)how to separate regions of lands and grooves on interference fringe patterns of tooth flank of the shaving cutter, (2)how to convert discontinuous phase obtained from brightness data of interference fringe data into continuous phase data, and(3)the measured region is restricted because of reduction of width on image of land and groove in the direction of face width in the incident side of beam by increment of incident angle at the region.(3)To solve the problems mentioned above, each algorithm to above terms was introduced and the new data processing method enable to obtain form deviation of shaving cutter all over total region of objective tooth flank to be measured.(4)As fundamental research on measuring form deviation of grinding wheel with shape of internal gear, plane test piece on which emery paper was pasted and also the surface was covered with powder of alumina with some kinds of diameters. But the test surfaces were irradiated by the laser beam with large angle of incidence, the surface didn't give reflected beam for several incident angles.