Measurement of Tooth Fom Deviation of Gear-Shaped Tools by Laser Interferometry

(1)用大入射角激光干涉法测量了剃齿刀齿面形状偏差.(2)测量物镜的几个问题是：(1)如何在剃齿刀齿面干涉条纹图样上分离槽脊区域；(2)如何将干涉条纹数据的亮度数据得到的不连续相位转换为连续相位数据，(3)为解决上述问题，介绍了对上述条件的各种算法，并提出了新的数据处理方法，使剃齿刀的形状误差可以覆盖整个被测目标齿面的整个区域。(4)作为内齿轮形状测量砂轮形状误差的基础研究，在平面试件上粘贴了砂纸，并在其表面覆盖了不同直径的氧化铝粉末。但被测表面被大角度入射的激光照射，在几个入射角下，表面都没有反射光束。

(1)Form deviation of tooth flank of a shaving cutter as objective with gear tooth-shaped tool was measured by the interferometry method using laser beam with large incidence angle.(2)Some problems on measuring the objective are follows : (1)how to separate regions of lands and grooves on interference fringe patterns of tooth flank of the shaving cutter, (2)how to convert discontinuous phase obtained from brightness data of interference fringe data into continuous phase data, and(3)the measured region is restricted because of reduction of width on image of land and groove in the direction of face width in the incident side of beam by increment of incident angle at the region.(3)To solve the problems mentioned above, each algorithm to above terms was introduced and the new data processing method enable to obtain form deviation of shaving cutter all over total region of objective tooth flank to be measured.(4)As fundamental research on measuring form deviation of grinding wheel with shape of internal gear, plane test piece on which emery paper was pasted and also the surface was covered with powder of alumina with some kinds of diameters. But the test surfaces were irradiated by the laser beam with large angle of incidence, the surface didn't give reflected beam for several incident angles.