Measurement of Tooth Fom Deviation of Gear-Shaped Tools by Laser Interferometry

(1)采用大入射角激光束干涉法测量以齿轮齿形刀具为目标的剃齿刀齿面形状偏差。(2)在测量目标方面存在以下几个问题：(1)如何在剃须刀齿侧干涉条纹图案上分离出土地和沟槽区域；(2)如何将干涉条纹亮度数据得到的不连续相位转换为连续相位数据；(3)由于在该区域增加入射角会使光束入射侧的土地和沟槽图像沿面宽方向的宽度减小，因此测量区域受到限制。(3)针对上述问题，介绍了上述各项的算法，并采用新的数据处理方法获得了剃须刀在待测目标齿面总区域的形状偏差。(4)内齿轮形砂轮形状偏差测量的基础研究，在平面试样上粘贴砂纸，表面覆盖不同直径的氧化铝粉末。但试验表面受到大入射角的激光束照射，在几个入射角下表面不产生反射光束。

(1)Form deviation of tooth flank of a shaving cutter as objective with gear tooth-shaped tool was measured by the interferometry method using laser beam with large incidence angle.(2)Some problems on measuring the objective are follows : (1)how to separate regions of lands and grooves on interference fringe patterns of tooth flank of the shaving cutter, (2)how to convert discontinuous phase obtained from brightness data of interference fringe data into continuous phase data, and(3)the measured region is restricted because of reduction of width on image of land and groove in the direction of face width in the incident side of beam by increment of incident angle at the region.(3)To solve the problems mentioned above, each algorithm to above terms was introduced and the new data processing method enable to obtain form deviation of shaving cutter all over total region of objective tooth flank to be measured.(4)As fundamental research on measuring form deviation of grinding wheel with shape of internal gear, plane test piece on which emery paper was pasted and also the surface was covered with powder of alumina with some kinds of diameters. But the test surfaces were irradiated by the laser beam with large angle of incidence, the surface didn't give reflected beam for several incident angles.