Contact Free Measurement of Tooth Form Deviation of Involute Gear Using Laser Interferometry

(1)在CCD图像传感器上获得干涉条纹图。这些图形足以转化为齿面偏差。(2)将花纹的亮度转换为齿面的形状偏差。并与传统的触针法进行了比较。该测量方法具有期望的精度，并且确认能够测量诸如齿形的波动。(3)作为测量的第一步，将具有精确齿形的磨削齿面用作基准齿面。但这种基准齿轮的应用并不适合工业应用。如果预先测量了所选齿面的精度，则采用该齿面作为基准齿面。通过干涉测量法测量待测量的齿面相对于基准齿面的形状偏差。通过干涉测量法将先前通过使用接触触针的常规方法测量的形状偏差添加到形状偏差中。该方法的准确度与常规测量结果一致。

(1) Interference fringe patterns are obtained on the CCD image sensor. The patterns are enough to transform to form deviation of the tooth flank.(2) The brightness of the patterns is converted to the form deviation of tooth flank. The tooth form deviation is compared with the result by conventional method using contacting stylus. The method of this measurement has the desired accuracy and it is confirmed to be able to measure such as undulation of the tooth form.(3) As the first step of this measurement, the ground tooth flank with accurate tooth form is used as a reference tooth flank. But application of this reference gear is not adequate method for the industrial use. If accuracy of a tooth flank chosen is previously measured, the tooth flank is employed as reference tooth flank. The form deviation of the tooth flank to be measured for the reference tooth flank is measured by the interferometry measurement. The form deviation previously measured by the conventional method using contacting stylus is added to the form deviation by interferometry. The accuracy of the method coincide to the result by the conventional measurement.