Contact Free Measurement of Tooth Form Deviation of Involute Gear Using Laser Interferometry

(1)在CCD图像传感器上获得干涉条纹图样。将图案的亮度转换为齿面的形状偏差。将齿形偏差与传统的接触式触针测量结果进行了比较。该测量方法具有预期的精度，能够测量齿形起伏等。(3)作为测量的第一步，以齿形准确的磨齿齿面作为基准齿面。但这种基准齿轮的应用还不足以满足工业应用的需要。如果事先测量了所选齿面的精度，则使用该齿面作为基准齿面。用干涉测量法测量基准齿面的待测齿面形状偏差。通过干涉测量法将先前使用接触式指示笔的传统方法测量的形状偏差添加到形状偏差中。该方法的精度与常规测量结果相吻合。

(1) Interference fringe patterns are obtained on the CCD image sensor. The patterns are enough to transform to form deviation of the tooth flank.(2) The brightness of the patterns is converted to the form deviation of tooth flank. The tooth form deviation is compared with the result by conventional method using contacting stylus. The method of this measurement has the desired accuracy and it is confirmed to be able to measure such as undulation of the tooth form.(3) As the first step of this measurement, the ground tooth flank with accurate tooth form is used as a reference tooth flank. But application of this reference gear is not adequate method for the industrial use. If accuracy of a tooth flank chosen is previously measured, the tooth flank is employed as reference tooth flank. The form deviation of the tooth flank to be measured for the reference tooth flank is measured by the interferometry measurement. The form deviation previously measured by the conventional method using contacting stylus is added to the form deviation by interferometry. The accuracy of the method coincide to the result by the conventional measurement.