U.S.-Japan Cooperative Research: Optoelectronic Circuit Design and Fabrication

美日合作研究：光电电路设计与制造

• 批准号: 9315335
• 负责人: Klaus Bachmann
• 金额: $ 3.3万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-04-01 至 1996-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9315335&HistoricalAwards=false
• 关键词: U.S.; Japan; Cooperative; Research; Optoelectronic

9315335 Bachmann This award supports a two-year collaborative research project between Professor Klaus Bachmann, Department of Materials Science and Engineering, North Carolina State University, and Dr. Mitsumasa Koyanagi, Research Center for Integrated Systems, Hiroshima University, Japan. The joint research will focus on the development of new technologies for vertical optical interconnection of silicon (Si) devices by III-V compound semiconductor optoelectronic devices using active and passive optical components. The following research issues will be addressed: (1) heteroepitaxy of III-V optoelectronic materials on Si chips; (2) heteroepitaxy of Si on III-V optoelectronic heterostructures devices; (3) low-damage dry- etching of Si and III-V's; (4) metal contacts to Si and III-V's; and (5) passive optical components including waveguides and dielectric mirrors. The U.S. and Japanese research groups are already working on projects closely related to the broader goals of the integrated program, and the interactions will build on and enhance the value of these programs. The expertise and facilities at Hiroshima University are in nanofabrication and optical integration, while the North Carolina State University group is strong in fundamental knowledge of materials growth, device processing, and materials characterization. These complementary attributes will permit the researchers to address advanced topics in both scientific and technological research areas that could not be pursued by either institution separately. This research is important for the successful development of new parallel processing computer system concepts such as optically coupled three dimensional common memory structures. ***

小行星9315335 该奖项支持北卡罗来纳州州立大学材料科学与工程系Klaus Bachmann教授和日本广岛大学集成系统研究中心Mitsumasa Koyanagi博士之间为期两年的合作研究项目。 联合研究将重点开发使用有源和无源光学元件的III-V族化合物半导体光电器件实现硅（Si）器件垂直光学互连的新技术。 将解决以下研究问题：（1）在硅芯片上异质外延III-V族光电材料;（2）在III-V族光电异质结构器件上异质外延Si;（3）Si和III-V族的低损伤干法蚀刻;（4）与Si和III-V族的金属接触;以及（5）无源光学元件，包括波导和介质镜。 美国和日本的研究小组已经在研究与综合计划的更广泛目标密切相关的项目，这种互动将建立在这些计划的基础上并提高其价值。 广岛大学的专业知识和设施是在纳米纤维和光学集成，而北卡罗来纳州州立大学集团是强大的材料生长，器件加工和材料表征的基础知识。 这些相辅相成的特点将使研究人员能够处理科学和技术研究领域中任何一个机构都无法单独从事的高级课题。 这项研究是重要的成功开发新的并行处理计算机系统的概念，如光耦合三维公共存储器结构。 ***