Modulation Spectroscopy for the Characterization/ Qualification of Semiconductor Device Structures

用于表征/鉴定半导体器件结构的调制光谱

• 批准号: 9414209
• 负责人: Fred Pollak
• 金额: $ 23万
• 依托单位: CUNY Brooklyn College
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-02-01 至 1999-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9414209&HistoricalAwards=false
• 关键词: Modulation; Spectroscopy; Characterization; Qualification; Semiconductor

9414209 Pollak Fundamental research directed toward improved understanding of growth and processing of semiconductors, and the electronic properties of heterostructures through the development and use of advanced modulation spectroscopy, particularly photore flectance and electrore flectance, for an effective screening tool in the characterization of semiconductor device structures will be conducted. The research base established will serve to improve materials parameters such as alloy composition, Schottky barrier heights, interfacial quality, and well width in quantum well structures and superlattices. %%% This research is expected to provide deeper fundamental understanding of semiconductor growth and processing, and the fundamental electronic properties of heterostructures. A major advantage of the methods being developed is that they can be used in situ and in real time for effective improvement in the control of advanced semiconductor growth and subsequent processing as well as providing fundamental information on the basic electronic properties of these materials. ***

小行星9414209 将进行基础研究，以提高对半导体生长和加工的理解，以及通过开发和使用先进的调制光谱学，特别是光电反射和电反射，作为半导体器件结构表征的有效筛选工具，来研究异质结构的电子特性。 所建立的研究基础将有助于改善材料参数，如合金成分，肖特基势垒高度，界面质量，量子阱结构和超晶格中的阱宽。 %%% 这项研究有望为半导体生长和加工以及异质结构的基本电子特性提供更深入的基础理解。 正在开发的方法的一个主要优点是，它们可以在原位和真实的时间内用于有效地改进先进半导体生长和后续处理的控制，以及提供关于这些材料的基本电子性质的基本信息。 ***