Modulation Spectroscopy for the Characterization/ Qualification of Semiconductor Device Structures

9414209将开展波拉克基础研究，旨在通过开发和使用先进的调制光谱，特别是光斑反射和电晕反射，提高对半导体生长和加工以及异质结构的电子性质的了解，从而成为表征半导体器件结构的有效筛选工具。建立的研究基地将有助于改善量子井结构和超晶格中的合金成分、肖特基势垒高度、界面质量和势垒宽度等材料参数。这项研究有望对半导体的生长和加工以及异质结的基本电子性质有更深的了解。正在开发的方法的一个主要优点是，它们可以在现场和实时地用于有效地改进对先进半导体生长和后续工艺的控制，以及提供关于这些材料的基本电子性质的基本信息。***

9414209 Pollak Fundamental research directed toward improved understanding of growth and processing of semiconductors, and the electronic properties of heterostructures through the development and use of advanced modulation spectroscopy, particularly photore flectance and electrore flectance, for an effective screening tool in the characterization of semiconductor device structures will be conducted. The research base established will serve to improve materials parameters such as alloy composition, Schottky barrier heights, interfacial quality, and well width in quantum well structures and superlattices. %%% This research is expected to provide deeper fundamental understanding of semiconductor growth and processing, and the fundamental electronic properties of heterostructures. A major advantage of the methods being developed is that they can be used in situ and in real time for effective improvement in the control of advanced semiconductor growth and subsequent processing as well as providing fundamental information on the basic electronic properties of these materials. ***