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Small Grants for Exploratory Research: Femtosecond Pulsed Laser Machining of Chemical Vapor Deposition (CVD)-Diamond

用于探索性研究的小额资助：化学气相沉积 (CVD) 金刚石的飞秒脉冲激光加工

基本信息

批准号：
9504102
负责人：
Palaniappa Molian
金额：
$ 2.32万
依托单位：
Iowa State University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
1995
资助国家：
美国
起止时间：
1995-04-01 至 1996-03-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=9504102&HistoricalAwards=false
关键词：
Small Grants Exploratory Research Femtosecond

项目摘要

9504102 Molian The feasibility of a novel femtosecond pulsed excimer laser processing technique for precision machining of chemical vapor deposition (CVD)-diamond films will be investigated. Femtosecond pulsed laser ablation of diamond is expected to be significantly different from that of currently practiced nanosecond or longer-pulsed laser ablation because of its capability to provide extreme intensities and larger absorption depth/thermal diffusion distance ratios. Femtosecond lasers can offer an entirely new spectrum of laser-diamond interactions that can alter dynamics of ablation products (energy and mass distribution), nature of particle emission (ionized, neutral, etc.) and associated phenomena namely plasma formation and shock propagation. Consequently, there will be a greater degree of atomization of material to be removed, reduced thermal component of ablation, absence of clusters and particulates on the machined surfaced, and less probability for the transformation of diamond to graphite. Such effects ultimately lead the proposed machining technique to be a high precision, contamination-free, time efficient procedure for craggy CVD-diamond films that requires low bulk temperature during machining. It is anticipated that this novel laser processing scheme will not only refine the existing laser-processing techniques but also surpass all other diamond micromachining techniques and, additionally, generate new applications in other areas of research such as deposition of thin films.

9504102 Molian将研究一种新的飞秒脉冲准分子激光加工技术用于化学气相沉积(CVD)金刚石薄膜精密加工的可行性。由于飞秒脉冲激光能够提供极强的强度和更大的吸收深度/热扩散距离比，对金刚石的烧蚀预计将与目前实践中的纳秒或更长脉冲激光烧蚀有很大不同。飞秒激光可以提供一种全新的激光-钻石相互作用光谱，可以改变烧蚀产物的动力学(能量和质量分布)、粒子发射的性质(电离、中性等)。以及与之相关的现象，即等离子体形成和激波传播。因此，需要去除的材料的雾化程度将更高，烧蚀的热成分将减少，加工表面上没有团簇和颗粒，金刚石转变为石墨的可能性将降低。这些效应最终使所提出的加工技术成为一种高精度、无污染、省时的加工工艺，适用于加工过程中需要较低整体温度的崎岖CVD-金刚石薄膜。预计这种新的激光加工方案不仅将完善现有的激光加工技术，而且将超过所有其他金刚石微加工技术，此外，还将在薄膜沉积等其他研究领域产生新的应用。