Microfabrication and Manufacture of 3C-SiC MEMS Pressures Sensors for Harsh Environments

适用于恶劣环境的 3C-SiC MEMS 压力传感器的微加工和制造

• 批准号: 0619115
• 负责人: Palaniappa Molian
• 金额: --
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-07-01 至 2010-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0619115&HistoricalAwards=false
• 关键词: Microfabrication; Manufacture; 3C; SiC; MEMS

The research objective of the project is to gain a fundamental understanding of a novel microfabrication and manufacture scheme for SiC-based, high-temperature MEMS pressure sensors. The approach consists of utilizing short-pulsed lasers to bulk micromachine 3C-SiC pressure sensor chips with an integrated piezoresistive strain gauge and temperature compensation. In addition, prototype sensors will be built by integrating the sensor chips with novel high temperature contact, bond pad and packaging materials, and electrical interconnect technology suitable for direct use in the temperature range 600C to 800C and in the pressure range 20 psi to 1000 psi. Research will create unique pressure sensors by forming diaphragms with precisely controlled thickness over large areas; developing sensing elements and pads with high reproducibility; robust packaging; and high-volume production. The success of this project will accelerate the understanding and applications of single crystalline 3C-SiC, an important semiconductor for both MEMS and microelectronic devices in hostile and harsh environments. The societal contributions of the project will include improved energy efficiency and green environment. The industrial benefits are lower power consumption and cost in monitoring and controlling systems for utility power plants, industrial process controls, automotive power train control, energy exploration in oil and gas drilling, and fuel cells. The program will have impact in engineering education by promoting multidisciplinary teaching and research training of participants and enhancing the infrastructure at the university by contributing towards two world-class Iowa State University centers in micro-manufacturing. The program will engage the participation of women, and minority students and high-school teachers; improve mechanical, materials and electrical engineering curricula; and disseminate the research results to the scientific community through journals and conferences.

该项目的研究目标是获得一个新的微加工和制造方案的SiC为基础的，高温MEMS压力传感器的基本理解。该方法包括利用短脉冲激光批量微加工3C-SiC压力传感器芯片与集成的压阻应变计和温度补偿。 此外，原型传感器将通过将传感器芯片与新型高温接触、焊盘和封装材料以及适合在600 C至800 C的温度范围和20 psi至1000 psi的压力范围内直接使用的电互连技术集成而构建。研究将通过在大面积上形成具有精确控制厚度的隔膜来制造独特的压力传感器;开发具有高再现性的传感元件和衬垫;坚固的包装;以及大批量生产。该项目的成功将加速对单晶3C-SiC的理解和应用，这是在恶劣和恶劣环境中用于MEMS和微电子器件的重要半导体。该项目的社会贡献将包括提高能源效率和绿色环境。 其工业效益是降低了公用事业发电厂、工业过程控制、汽车动力传动系控制、石油和天然气钻探中的能源勘探以及燃料电池的监测和控制系统的功耗和成本。该计划将通过促进参与者的多学科教学和研究培训，并通过为两个世界级的爱荷华州州立大学微型制造中心做出贡献来加强大学的基础设施，从而对工程教育产生影响。该方案将吸引妇女、少数民族学生和高中教师的参与;改进机械、材料和电气工程课程;并通过期刊和会议向科学界传播研究成果。