Nanocrystalline Thin Films of New Ultra-Hard Borides for Microelectromechanical Systems (MEMS) and Tooling Applications

用于微机电系统 (MEMS) 和模具应用的新型超硬硼化物纳米晶薄膜

• 批准号: 0084969
• 负责人: Palaniappa Molian
• 金额: $ 20万
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-01 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0084969&HistoricalAwards=false
• 关键词: Nanocrystalline; Thin; Films; New; Ultra

The objective of this grant is to develop a fundamental understanding of synthesizing nanocrystalline thin films of ultra-hard borides with predictability and reproducibility. Ultra-hard borides, recently discovered by the co-Principal Investigator, are the new, second hardest materials on earth with a projected cost of manufacture approximately 10% of the cost of diamond and cubic BN. Research will focus on the development of a novel Ti:Sapphire femtosecond (fs) pulsed laser deposition (PLD) technique for preparing ultra-hard boride thin films on silicon and cemented carbide substrates for Microelectromechanical Systems (MEMS) and hard turning applications respectively. The films will be compared to those deposited by conventional nanosecond (ns) PLD. The research will investigate the laser-boride interactions as a function of pulse width and the interactions of plasma with the surface of substrate that affect the evolution of structure, composition, and growth of films. Nanoindentation and scratch tests will be used for mechanical characterization that includes hardness, Young's modulus, and adherence. Hard coating applications in tools and MEMS will be explored.The research has potential for enormous payoffs. This pioneering work will set the stage and serve as a catalyst for rapid and innovative advances in the new boride materials for numerous tool and hard coating applications including bulk cutting tools, hard and erosion resistant coatings, wear-resistant electrical switch contacts, and conductive thin films for MEMS. In addition, these coatings can serve as high-temperature solid lubricants. The integrated experimental and analytical approach is expected to transfer the next-generation hard material as well as advanced laser process technology to industry and supply high-quality products to manufacturing industries. Graduate and undergraduate students from both Mechanical Engineering and Materials Science and Engineering will benefit from hands-on research experience in preparation of nanocrystalline borides, advanced laser deposition of thin films, advanced machining, and MEMS fabrication.

该资助的目的是对可预测性和可重复性合成超硬硼化物纳米晶薄膜有一个基本的了解。 联合首席研究员最近发现的超硬硼化物是地球上第二硬的新材料，预计制造成本约为金刚石和立方氮化硼成本的10%。 研究将集中在一种新的钛：蓝宝石飞秒（fs）脉冲激光沉积（PLD）技术的发展，用于制备超硬硼化物薄膜的硅和硬质合金基板上的微机电系统（MEMS）和硬车削应用程序分别。 将薄膜进行比较，由传统的纳秒（ns）PLD沉积。 本研究将探讨雷射硼化物交互作用作为脉宽的函数，以及电浆与基板表面的交互作用，影响薄膜的结构、组成与成长。 纳米压痕和划痕试验将用于机械表征，包括硬度、杨氏模量和粘附性。 硬涂层在工具和微机电系统中的应用将被探索。这项研究具有巨大的回报潜力。 这项开创性的工作将为新型硼化物材料的快速创新发展奠定基础，并作为催化剂，用于众多工具和硬涂层应用，包括散装切削工具，硬质和耐腐蚀涂层，耐磨电气开关触点和MEMS导电薄膜。 此外，这些涂层可用作高温固体润滑剂。 集成的实验和分析方法有望将下一代硬质材料以及先进的激光加工技术转移到工业中，并为制造业提供高质量的产品。 来自机械工程和材料科学与工程的研究生和本科生将受益于纳米晶硼化物制备，薄膜先进激光沉积，先进加工和MEMS制造的实践研究经验。