Fundamental Investigation of Micro-scale Friction and Wear Mechanisms in Microelectromechanical Systems (MEMS)

微机电系统 (MEMS) 中微观摩擦磨损机制的基础研究

• 批准号: 9504403
• 负责人: Kyriakos Komvopoulos
• 金额: $ 26.97万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-05-15 至 1999-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9504403&HistoricalAwards=false
• 关键词: Fundamental; Investigation; Micro; scale; Friction

9504403 Komvopoulos The adhesion and microtribological phenomena of relevance to microelectromechanical systems (MEMS) will be studied. Special micromechanical devices will be constructed to allow measurement of the very minute forces involved. Emphasis will be given to the study of high friction leading to sticking during operation of micromachines due to capillary, van der Waals, and electrostatic force effects. The experimental studies will be supplemented with molecular dynamics simulations of normal and sliding contacts to analyze the dependence of friction on lattice parameters, direction and speed of motion, and temperature. From indentation measurements constitutive relations will be developed for evaluation of the tribological results. ***

9504403 Komvopoulos将研究与微机电系统（MEMS）相关的粘附和微摩擦学现象。 将建造特殊的微机械装置来测量所涉及的非常微小的力。 重点将放在研究高摩擦导致粘附在操作过程中的微机械由于毛细管，货车德瓦尔斯，和静电力的影响。 实验研究将辅以正常和滑动接触的分子动力学模拟，以分析摩擦对晶格参数、运动方向和速度以及温度的依赖性。 从压痕测量本构关系将开发的摩擦学结果的评价。 ***