Basic Studies of the Effects of Microfabrication, Environment, and Cyclic-Loading on the Long-Term Durability of Thin-Film Microstructures

微加工、环境和循环载荷对薄膜微结构长期耐久性影响的基础研究

• 批准号: 9872324
• 负责人: Kyriakos Komvopoulos
• 金额: $ 33.86万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-01 至 2002-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9872324&HistoricalAwards=false
• 关键词: Basic; Studies; Effects; Microfabrication; Environment

DMI-9872324 Komvopoulos This research in Long Term Durability of Materials and Structures will study the effects of design and micro-fabrication on the micromechanical properties of polysilicon microstructures. In order to develop a better understanding of the relationship between cyclic stress (or strain) amplitude and fatigue life for polysilicon processed under different conditions and exposed to different environments, an innovative experimental scheme based upon surface micromachining technology will be used. The ultimate objective is to investigate the effects of fabrication process parameters (doping, etching, and annealing), specimen size, microstructure characteristics (grain size), type and amplitude of loading, and environmental conditions on the mechanical behavior and endurance of polysilicon thin-film microstructures. The relationship between design considerations, processing parameters, and subsequent durability of the resulting microstructures to resist crack initiation will be investigated. Characterization techniques will include imaging and surface force microprobe experimentation, with a novel vacuum probe station specifically designed to simulate typical micromachine operating conditions, to analyze the fatigue behavior and crack initiation. This project will provide an excellent opportunity for training graduate students in high endurance design of microeletromechanical systems devices. The knowledge base for material deterioration at the microscale will be advanced with this work.

DMI-9872324 Komvopoulos材料和结构长期耐久性研究将研究设计和微制造对多晶硅微结构微观机械性能的影响。为了更好地了解在不同加工条件和不同环境下加工的多晶硅的循环应力(应变)幅值与疲劳寿命之间的关系，将采用一种基于表面微加工技术的创新实验方案。最终目的是研究制备工艺参数(掺杂、刻蚀和退火)、样品尺寸、微结构特征(晶粒度)、加载类型和幅度以及环境条件对多晶硅薄膜微结构的力学行为和耐久性的影响。将研究设计考虑因素、工艺参数和随后的抗裂纹引发微结构的耐久性之间的关系。表征技术将包括成像和表面力微探头实验，以及专门为模拟典型微机械操作条件而设计的新型真空探针站，以分析疲劳行为和裂纹萌生。该项目将为培养研究生在微电子机械系统器件的高耐久性设计方面提供一个极好的机会。这项工作将推进材料微尺度劣化的知识库研究。