Basic Reseaarch on the Dependence of Structure and Nano- mechanical Properties of Ultra-thin Protective Overcoats on Processing Conditions

超薄防护涂层结构和纳米力学性能对加工条件依赖性的基础研究

• 批准号: 9734907
• 负责人: Kyriakos Komvopoulos
• 金额: $ 6.05万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-15 至 2000-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9734907&HistoricalAwards=false
• 关键词: Basic; Reseaarch; Dependence; Structure; Nano

CMS 9734907PI: K. KomvopoulosUniv of CA BerkeleyABSTRACTBasic research is performed on the dependence of the composition, microstructure, topography, and nano-mechanical properties of ultra-thin carbon overcoats on plasma deposition conditions and the nano-tribological properties of these films. The processing parameters studied, based on a factorial design of experiments approach, are the RF power, chamber pressure, substrate bias voltage, and deposition rate. Correlations developed in this research lead to the identification of optimum film processing parameters and provide insight into micro-scale tribophenomena. The results help to enhance the technological basis for the design of anti-friction, wear-resistant interfaces of leading-edge technologies such as high-density magnetic recording.

本文对超薄碳涂层的组成、微观结构、形貌和纳米力学性能与等离子体沉积条件和薄膜纳米摩擦学性能的关系进行了基础研究。基于实验的析因设计方法，研究的工艺参数是射频功率、腔压、衬底偏置电压和沉积速率。在这项研究中发展的相关性导致了最佳薄膜加工参数的确定，并提供了微观尺度摩擦现象的见解。研究结果有助于增强高密度磁记录等前沿技术的抗摩擦、耐磨接口设计的技术基础。