MIT Microfabrication Infrastructure

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9512183 Kastner This proposal request equipment to upgrade two existing MIT facilities: (1) the Microsystems Technology Laboratory (MTL) devoted to ultraclean semiconductor processing and (2) the Microfabrication Shared Experimental Facility (MSEF) for fabricating general-purpose microstructures. The request for the MSEF facility consists of an e-beam evaporator, a thermal evaporator, a device characterization station and sputtering system, while the MTL request is for a chemical mechanical polishing (CMP) for silicon wafers and an ECR RIE plasma CVD system. ***