Chemical Composition Profiling of Ultra-thin Silcon Dioxide/Silicon Nitride and Other Alternative Multilayer Dielectrics for Advanced Microelectronic Devices

用于先进微电子器件的超薄二氧化硅/氮化硅和其他替代多层电介质的化学成分分析

• 批准号: 9720424
• 负责人: John Hauser
• 金额: $ 45.4万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-10-01 至 2000-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9720424&HistoricalAwards=false
• 关键词: Chemical; Composition; Profiling; Ultra; thin

9720424 Hauser The purpose of this award is to provide funds for the Engineering Research Center at North Carolina State University on Advanced Microelectronic Devices to collaborate with Rutgers University, International Business Machines, and Lucent Technologies to add expertise in the area of advanced characterization of electronic materials and device performance. Rutgers University is a center of excellence in ion beam and x-ray photoelectron spectroscopy, and IBM and Lucent Technologies add expertise in characterization of device performance. The Engineering Research Center has succeeded in producing thin film nitrided stacked gate electronic device structures that have the potential for application in commercial markets. This collaborative effort will provide understanding of the chemical and physical structure of these structures at the mono-atomic layer level. This understanding is necessary if the devices are to be accepted by the industry. The research consists of three tasks: 1) materials synthesis (NC State), 2) ion beam and x-ray photoelectron spectroscopy (Rutgers University), and 3) definition of materials specifications at the monolayer level for advanced device structures (IBM and Lucent). One of the main goals is to transfer knowledge gained in this research to industry.

小行星9720424豪瑟 该奖项的目的是为北卡罗来纳州州立大学先进微电子器件工程研究中心提供资金，与罗格斯大学、国际商业机器公司和朗讯科技公司合作，增加电子材料和器件性能先进表征领域的专业知识。 罗格斯大学是离子束和X射线光电子能谱的卓越中心，IBM和朗讯科技公司在器件性能表征方面增加了专业知识。 工程研究中心已成功生产出具有商业应用潜力的薄膜氮化叠栅电子器件结构。 这种合作努力将提供在单原子层水平上对这些结构的化学和物理结构的理解。 如果这些设备要被行业接受，这种理解是必要的。 该研究包括三个任务：1）材料合成（NC State），2）离子束和X射线光电子能谱（Rutgers University），以及3）先进器件结构单层水平的材料规格定义（IBM和Lucent）。 主要目标之一是将这项研究中获得的知识转移到工业中。