Enhanced Single Wafer Research Cluster for Advanced Electronic Materials Processing

9872794豪瑟该奖项旨在向北卡罗来纳州立大学先进电子材料加工工程研究中心提供资金，用于购买两个单晶圆加工模块，用于开发下一代集成电路制造方法。所要求的设备将加强该中心的金属硅栅堆叠研究集群，并能够使用直径200毫米的硅晶片，这将提供将研究结果直接转移到半导体行业的能力。这两个模块分别是远程等离子体处理器和现场分析室。

9872794 Hauser This award is to provide funds to the Engineering Research Center on Advanced Electronic Materials Processing at North Carolina State University to purchase two single wafer processing modules for use in developing next generation integrated circuit fabrication approaches. The requested equipment will enhance the metal on silicon gate stack research cluster at the Center and enable the use of silicon wafers 200 millimeters in diameter, which will provide the capability to transfer the results of the research directly to the semiconductor industry. The two modules are remote plasma processor and an in situ analysis chamber respectively.