Enhanced Single Wafer Research Cluster for Advanced Electronic Materials Processing

用于先进电子材料加工的增强型单晶圆研究集群

• 批准号: 9872794
• 负责人: John Hauser
• 金额: $ 37.46万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-10-01 至 2000-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9872794&HistoricalAwards=false
• 关键词: Enhanced; Single; Wafer; Research; Cluster

9872794 Hauser This award is to provide funds to the Engineering Research Center on Advanced Electronic Materials Processing at North Carolina State University to purchase two single wafer processing modules for use in developing next generation integrated circuit fabrication approaches. The requested equipment will enhance the metal on silicon gate stack research cluster at the Center and enable the use of silicon wafers 200 millimeters in diameter, which will provide the capability to transfer the results of the research directly to the semiconductor industry. The two modules are remote plasma processor and an in situ analysis chamber respectively.

小行星9872794豪瑟 该合同将为北卡罗来纳州州立大学的先进电子材料加工工程研究中心提供资金，用于购买两个单晶片加工模块，用于开发下一代集成电路制造方法。 所要求的设备将加强该中心的金属硅栅叠层研究集群，并使直径为200毫米的硅片能够使用，这将提供将研究结果直接转移到半导体行业的能力。 这两个模块分别是远程等离子体处理器和原位分析室。