Microelectromechanical and Microfluidic Systems

所进行的研究由两部分组成：新的材料和制造方法将扩大微机电系统（MEMS）设计的能力范围，提供新的能力，并提供与传统的硅基微加工相比更容易制造和更具成本效益的系统。该项目的这一部分侧重于展示新型材料（特别是有机聚合物）和新的制造方法（特别是微缩印刷、微成型和相关技术）的价值。第二部分的努力将集中在泵，阀门和流体耦合器的聚合物材料的开发，以利用其缺乏机械刚性，在表面改性技术的发展，以避免堵塞和表面污染，并在塑料，玻璃和硅/二氧化硅的微流体系统的快速原型技术。* * *

9729405 Whitesides The research undertaken is composed of two parts: new materials and methods of fabrication will broaden the range of capabilities in MicroElectroMechanical Systems (MEMS) design, providing new capabilities and offering systems which are easier to manufacture and are more cost-effective, in comparison with traditional Si-based micromachining. This portion of the project focuses upon the demonstration of the value of new classes of materials (especially organic polymers) and on new methods of fabrication (especially microprinting, micromolding and related techniques). The second part of the effort will focus on the development of pumps, valves and fluidic couplers in polymeric materials to exploit their lack of mechanical rigidity, on the development of surface modification techniques to avoid clogging and surface contamination, and on techniques for rapid prototyping of microfluidic systems in plastics, glasses and silicon/silicon dioxide. ***