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Scientific Grant for Exploratory Research (SGER) on Chemical-Mechanical Polishing of Langasite

Scientific Grant for Exploratory Research (SGER) on Chemical-Mechanical Polishing of Langasite
硅锰矿化学机械抛光探索性研究科学资助 (SGER)
批准号:
9814251
负责人:
Steven Danyluk
金额:
$2.5万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1998
资助国家:
美国
项目状态:
已结题
起止时间:
1998-08-15 至 1999-07-31

项目摘要

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中文摘要
翻译
9814251 Danyluk SGER奖将用于研究交变电场对浆料中非金属磨料颗粒运动的影响。 其目的是操纵颗粒及其与固体表面的相互作用,特别是针对化学机械抛光过程。 该项目将利用流体动力学、材料变形、摩擦学、表面分析和化学机械抛光方面的专业知识。 ***
英文摘要
9814251 Danyluk An SGER award will be used to study the influence of alternating electrical fields on the motion of non-metallic abrasive particles in slurries. The purpose is to manipulating the particles and their interaction with a solid surface, specifically aimed at the process of chemo- mechanical polishing. The project will take advantage of expertise in fluid dynamics, materials deformation, tribology, surface analysis, and chemo-mechanical polishing. ***
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