Compact Modeling of Integrated Microsystems

该项目是欧共体研究中心-小型企业协同研发计划的一部分。合作伙伴是华盛顿州立大学模拟-数字集成电路设计中心（CDADIC）和位于俄勒冈州比弗顿的一家小公司Analogy， Inc.。这项工作将利用在CDADIC进行的紧凑型设备建模，该建模处理主要适用于压力和惯性传感器的微机械结构。根据本合同进行的研究将把这一概念扩展到更通用的集成微系统，这将不仅仅涉及电气-机械耦合，并将提供一个结构化的基础，通过该基础，新的公共领域设备模型可以很容易地开发并纳入微系统设计。这项工作将涉及该中心与多领域、混合模式仿真软件的领先开发商类推公司之间的密切合作。主要产品是军刀模拟器，现在是汽车和航空航天系统仿真的标准，非常适合处理微系统中出现的多个互连物理域。集成微系统设计的仿真工具和方法的发展将鼓励标准化、验证和模型精度性能测量的出现，这将支持集成传感器、换能器、微机电系统和微分析系统领域的发展。

RingoEEC-9820444This project is funded as a part of the EEC initiative on Research Centers - Small Firms Collaborative R&D. The cooperating partners are the Center for the Design of Analog-Digital Integrated Circuits (CDADIC) at Washington State University, and Analogy, Inc., a small firm located in Beaverton, OR. The work will draw upon compact device modeling carried out at CDADIC that deals with micromachined structures mainly applicable to pressure and inertial sensors. The study to be conducted under the present award will extend this concept to more generic integrated microsystems which will involve more than just electrical-mechanical coupling, and will provide a structured basis through which new public domain device models can be readily developed and incorporated into microsystem design. The work will involve close collaboration between the Center and Analogy, Inc., which is the leading developer of multi-domain, mixed-mode simulation software. The primary product, the Saber simulator, which is now a standard for automotive and aerospace system simulation, is ideally suited for treating the multiple and interconnected physical domains which arise in microsystems. The development of of simulation tools and methods for integrated microsystem design will encourage standardization, validation, and model accuracy performance measures to emerge which will support the growing field of integrated sensors, transducers, micro-electro-mechanical systems, and microanalytical systems.