SBIR Phase I: On-Line, Real-Time Monitoring of Microelectronics Processes

SBIR 第一阶段：微电子工艺在线实时监控

• 批准号: 9860828
• 负责人: Jack Syage
• 金额: $ 9.92万
• 依托单位: SYAGEN TECHNOLOGY INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-01-01 至 1999-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9860828&HistoricalAwards=false
• 关键词: SBIR; Phase; Line; Real; Time

9860828 This Small Business Innovation Research Phase I project proposes new technology for an on-line mass spectrometer that offers a compelling performance and price breakthrough relative to existing technology used to monitor and control microelectronic manufacturing processes. The basic techniques are threshold photoionization (TPI) coupled to a quadruple ion trap/mass spectrometer. The TPI energy is sufficiently high to also ionize nearly all compounds of manufacturing interest (e.g., organics, amines, amides, phosphines, arsines, some si-lanes, and most heteroatom containing molecules) yet it is of sufficiently low energy to avoid fragmerttation of these molecules and to avoid ionization of common atmospheric constituents such as N2, 2, H20, CO2, CO, Ar, and other rare gases that are not directly involved in manufacturing processes. These at-tributes permit enormous simplification in the analysis of complex mixtures compared to currently available mass spectrometers. Based on previous research conducted in our laboratories and on a validated model for calculating ion production rates, we project detection sensitivity of 1 part-per-billion with 1 sec response time. This work builds on fundamental developments and commercial customers and third party financing have been identified to commercialize this technology. The proposed instrument is a universal ultra-sensitive real-time monitoring system whose applications are broad. Syagen is focusing on three market areas: (1) microelectronics and other manufacturing process monitoring (e.g., endpoint detection), (2) rapid monitoring of explosives or contraband in airline baggage, mail packages, or motor vehicles, and (3) monitoring of pollution for regulatory compliance and process efficiency, (e.g., in-field air, water, soil assaying, automobile or truck exhaust, refinery emission, etc.).

9860828这一小型企业创新研究第一阶段项目提出了一种在线质谱仪的新技术，相对于用于监测和控制微电子制造过程的现有技术，该技术提供了令人信服的性能和价格突破。其基本技术是与四重离子陷阱/质谱仪耦合的阈值光电离(TPI)。TPI能量足够高，也足以电离几乎所有与制造有关的化合物(例如，有机物、胺、酰胺、膦、砷、某些硅烷和大多数含有杂原子的分子)，但它的能量足够低，可以避免这些分子的碎裂，并避免常见大气成分的电离，如N2、2、H20、CO2、CO、Ar和其他不直接参与制造过程的稀有气体。与目前可用的质谱计相比，这些属性使复杂混合物的分析大大简化。基于我们实验室以前进行的研究和一个经过验证的离子产生率计算模型，我们预计在1秒响应时间下，检测灵敏度为十亿分之一。这项工作建立在基本发展的基础上，已经确定了商业客户和第三方融资来将这项技术商业化。该仪器是一种通用的超灵敏实时监测系统，具有广泛的应用前景。赛根正专注于三个市场领域：(1)微电子和其他制造过程监控(例如，终点检测)，(2)快速监控航空行李、邮包或机动车辆中的爆炸物或违禁品，以及(3)监控污染，以确保合规性和流程效率(例如，现场空气、水、土壤分析、汽车或卡车尾气、炼油厂排放等)。