Autonomous Operation of Planar Linear Motors

该项目将研究一系列必须解决的问题，以生产一种新型精密运动机器，这种机器能够在平面上快速移动，随后定位到亚微米精度，而不需要像今天的技术那样提供空气、电力和信号。目前工业上使用的平面直线电机以开环步进方式与系绳一起运行。这种操作模式使它们的运动范围受到限制，容易失去步骤，无法拒绝外部干扰（如系绳上的拖拽），无法提供受控力，并且无法提供高刚度。之前nsf资助的一个项目产生了技术进步，允许集成鲁棒位置传感和控制这类电机，提供改进的运动特性，包括更好的抗干扰性，更好的分辨率，降低能耗。在这些成果的基础上，本项目将探索最佳的能源利用、创新的无摩擦轴承设计以及创新的集成计算和通信技术，以消除对系绳的需求。消除系绳将允许基于平面电机的机器在其相应的定子表面上完全自由漫游。这将使基于这些电机的各种系统（包括制造系统）的运行得到显著改善。

This project will investigate the set of problems which must be solved to produce a new class of precision motion machines capable of rapidly moving over a planar surface and subsequently positioning to sub-micrometer precision without the need to provide air, power, and signals over a tether as is the case with today's technology. Planar linear motors currently used in industry operate with a tether in an open-loop stepping manner. This mode of operation makes them restricted in range of motion, susceptible to loss of steps, unable to reject external disturbances (such as tugs on the tether), unable to provide controlled forces, and unable to provide high stiffness. A previous NSF-funded project produced technology advances allowing integrated robust position sensing and control for this class of motors, providing improved motion characteristics including better disturbance rejection, better resolution, and reduced energy consumption. Building on these results, the present project will explore optimal energy utilization, innovative frictionless bearing design, and innovative integrated computing and communications technology to eliminate the need for a tether. Elimination of the tether will allow machines based on planar motors to be completely free-roaming over their corresponding stator surfaces. This will enable significant improvement in the operation of a wide range of systems, including manufacturing systems, that are based on these motors.