SBIR Phase II: Micromachined Scintillating Pixel X-Ray Imaging Plate

SBIR 第二阶段：微机械闪烁像素 X 射线成像板

• 批准号: 9901902
• 负责人: Charles Beetz
• 金额: $ 40万
• 依托单位: NANOSCIENCES CORP
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-07-15 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9901902&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Micromachined; Scintillating

This Small Business Innovative Research Phase II project focuses on x-ray and particle imaging of biological specimens using radionuclides, radiotracers or x-ray beams. An imaging detector requires:unity detection efficiency, photon counting; high spatial resolution film; improved contrast due to insensitivity to scattered x-rays or particles; linear response; dynamic range; low noise; and, differential attenuation imaging using x-ray energies. The research will address these issues with a novel form of high spatial precision imaging scintillator pixel plate, fabricated by micromachining of very high aspect ratio (length/diameter) holes in Si. The microchannels will be formed into dielectric waveguides (optical fibers) by forming a wall cladding film, for example, by oxidizing the walls to form SiO2. Because the Si/SiO2 microchannels can be taken to high temperatures, crystalline scintillators such as BG0, Nal or Csl can be vacuum melted to fill the holes, along with the scintillating glasses, plastic scintillators, and nanocrystalline scintillators. The resulting scintillating pixel plate will have features fully adjustable in size by photolithographic techniques, with holes from one micron to one millimeter in diameter, and, plate thickness up to approximately two millimeters. The scintillator array is well matched to the precision and spatial resolution of optical pixel detectors including CCD, image intensifiers, and film. This program may lead to novel large area, high precision x-ray imagers, enabling replacement of film or enhancing film in medical and dental x-rays. It may also lead to ultra-high precision fiber-optic plates at low cost, and compact full aperture optical and x-ray collimators.

这个小企业创新研究第二阶段项目的重点是使用放射性核素，放射性示踪剂或X射线束对生物标本进行X射线和粒子成像。成像探测器要求：单位探测效率、光子计数;高空间分辨率胶片;由于对散射X射线或粒子不敏感而提高的对比度;线性响应;动态范围;低噪声;以及使用X射线能量的差分衰减成像。 这项研究将解决这些问题，一种新的形式的高空间精度成像闪烁体像素板，非常高的纵横比（长度/直径）的孔在硅微加工制造。通过形成壁包覆膜，例如通过氧化壁以形成SiO2，将微通道形成为电介质波导（光纤）。因为Si/SiO2微通道可被置于高温，所以晶体结晶剂如BG 0、NaI或CsI可被真空熔融以填充孔，沿着有结晶玻璃、塑料结晶剂和纳米结晶剂。所得到的像素板将具有通过光刻技术在尺寸上完全可调节的特征，具有直径从1微米到1毫米的孔，以及高达约2毫米的板厚度。闪烁体阵列与包括CCD、图像增强器和胶片的光学像素探测器的精度和空间分辨率很好地匹配。 该计划可能会导致新的大面积，高精度的X射线成像仪，使替代胶片或增强胶片在医疗和牙科X射线。它还可能导致低成本的超高精度光纤板，以及紧凑的全孔径光学和X射线准直器。