SBIR Phase II: Micromachined Scintillating Pixel X-Ray Imaging Plate

SBIR 第二阶段：微机械闪烁像素 X 射线成像板

• 批准号: 9901902
• 负责人: Charles Beetz
• 金额: $ 40万
• 依托单位: NANOSCIENCES CORP
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-07-15 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9901902&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Micromachined; Scintillating

This Small Business Innovative Research Phase II project focuses on x-ray and particle imaging of biological specimens using radionuclides, radiotracers or x-ray beams. An imaging detector requires:unity detection efficiency, photon counting; high spatial resolution film; improved contrast due to insensitivity to scattered x-rays or particles; linear response; dynamic range; low noise; and, differential attenuation imaging using x-ray energies. The research will address these issues with a novel form of high spatial precision imaging scintillator pixel plate, fabricated by micromachining of very high aspect ratio (length/diameter) holes in Si. The microchannels will be formed into dielectric waveguides (optical fibers) by forming a wall cladding film, for example, by oxidizing the walls to form SiO2. Because the Si/SiO2 microchannels can be taken to high temperatures, crystalline scintillators such as BG0, Nal or Csl can be vacuum melted to fill the holes, along with the scintillating glasses, plastic scintillators, and nanocrystalline scintillators. The resulting scintillating pixel plate will have features fully adjustable in size by photolithographic techniques, with holes from one micron to one millimeter in diameter, and, plate thickness up to approximately two millimeters. The scintillator array is well matched to the precision and spatial resolution of optical pixel detectors including CCD, image intensifiers, and film. This program may lead to novel large area, high precision x-ray imagers, enabling replacement of film or enhancing film in medical and dental x-rays. It may also lead to ultra-high precision fiber-optic plates at low cost, and compact full aperture optical and x-ray collimators.

这个小型企业创新研究阶段II阶段项目着重于使用放射性核素，放射性示踪剂或X射线束对生物标本的X射线和颗粒成像。成像检测器需要：统一检测效率，光子计数；高空间分辨率膜；由于对散射的X射线或颗粒不敏感而改善对比度；线性响应；动态范围；低噪音；以及使用X射线能量的差异衰减成像。 这项研究将通过一种新型的高空间精度成像闪烁体像素板来解决这些问题，该图片是通过SI中非常高的长宽比（长度/直径）孔进行微加工来解决的。微通道将通过形成墙壁覆层膜（例如，通过氧化壁形成SiO2）形成墙壁覆层膜来形成介电波导（光纤）。由于可以将SI/SIO2微通道送到高温上，因此可以将晶体闪烁体（例如BG0，NAL或CSL）进行真空吸尘器融化以填充孔，以及闪烁的玻璃，塑料闪烁体和纳米晶型闪光灯。所得的闪烁像素板将通过光刻技术具有完全可调节的特征，其孔的直径从一个微米到一毫米，并且板厚度最高约为两毫米。闪烁体阵列与包括CCD，图像增强器和膜在内的光学像素探测器的精确和空间分辨率非常匹配。 该程序可能会导致新颖的大面积，高精度X射线成像仪，从而在医疗和牙科X射线中更换胶片或增强膜。它也可能以低成本导致超高精度光纤板，并紧凑型全孔光学和X射线准直仪。