SBIR Phase I: Micromachined Planar Single Pixel Photomultiplier Tube (PMT)

这个小企业创新研究的第一阶段项目是基于一种依赖于光辅助电化学阳极氧化和化学蚀刻的新工艺技术，在硅上开发一个像素大小的光电倍增管（PMT）。商业应用包括：(1)高颗粒光纤接收器；(2)用于机器视觉、线扫描仪、条纹相机和机器人视觉系统的高速像素探测器的平面阵列；（三）医疗、过程控制和诊断仪器。量子效率-增益带宽乘积将超过任何已知的能够用于船舶规模电光集成的像素探测器，并且在应用领域的系统成本将大大降低。

9761265 Beetz This Small Business Innovation Research Phase I project is to develop a pixel-size PhotoMultiplier Tube (PMT) on Silicon, based on a novel process technique relying upon photoassisted electrochemical anodisation and chemical etching. Commercial applications include: (1) High grain fiber-optic receivers; (2) Planar arrays of very high speed pixel detectors for machine vision, line scanners, streak cameras and robotic vision systems; and (3) Medical, process control and diagnostic instruments. The quantum-efficiency-gain bandwidth product will exceed any known pixel detector capable of ship-scale electro-optic integration, and the system cost in the applications arenas will decrease substantially.