SBIR Phase I: Micromachined Microchannel Plate X-Ray Detector

点击翻译按钮获取中文摘要

9861488 This Small Business Innovation Research Phase I project will conduct research to develop a high speed imaging x-ray detector for x-rays from 100 eV 20 KeV. It will employ a novel silicon/diamond film based microchannel plate (MCP), together with in situ x-ray photocathodes. Silicon wafers are micromachined to form high aspect ratio microchannel plates with photolithographic spatial precision. The doped diamond film activation, possible on silicon, but not glass MCP, provides a controlled strip resistance and very long-lived secondary emission surface. Because of the high temperature capabilities of the silicon and diamond, x-ray photocathodes for grazing incidence may be directly deposited on the MCP surface. This leads to a compact imaging x-ray detector with long life, high radiation resistance, high spatial and temporal resolution, low defects, high temperature operation, and high x-ray detection efficiency compared with existing imaging x-ray detectors. The silicon/diamond Microchannel Plate (N4CP) X-ray Detector will lead to new applications in medical imaging, x-ray inspection and scientific instrumentation, especially at high speeds, with full electronic image readout. Its cost may be very competitive with glass MCP of lower performance.