SBIR Phase I: Micromachined Microchannel Plate X-Ray Detector

SBIR 第一阶段：微机械微通道板 X 射线探测器

• 批准号: 9861488
• 负责人: Charles Beetz
• 金额: $ 10万
• 依托单位: NANOSCIENCES CORP
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-01-01 至 1999-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9861488&HistoricalAwards=false
• 关键词: SBIR; Phase; Micromachined; Microchannel; Plate

9861488 This Small Business Innovation Research Phase I project will conduct research to develop a high speed imaging x-ray detector for x-rays from 100 eV 20 KeV. It will employ a novel silicon/diamond film based microchannel plate (MCP), together with in situ x-ray photocathodes. Silicon wafers are micromachined to form high aspect ratio microchannel plates with photolithographic spatial precision. The doped diamond film activation, possible on silicon, but not glass MCP, provides a controlled strip resistance and very long-lived secondary emission surface. Because of the high temperature capabilities of the silicon and diamond, x-ray photocathodes for grazing incidence may be directly deposited on the MCP surface. This leads to a compact imaging x-ray detector with long life, high radiation resistance, high spatial and temporal resolution, low defects, high temperature operation, and high x-ray detection efficiency compared with existing imaging x-ray detectors. The silicon/diamond Microchannel Plate (N4CP) X-ray Detector will lead to new applications in medical imaging, x-ray inspection and scientific instrumentation, especially at high speeds, with full electronic image readout. Its cost may be very competitive with glass MCP of lower performance.

9861488这个小型企业创新研究第一阶段项目将进行研究，以开发一种用于100 eV 20keV X射线的高速成像X射线探测器。它将采用一种新型的硅/金刚石薄膜微通道板(MCP)，以及原位X射线光电阴极。硅片被微机械加工成具有光刻空间精度的高深宽比微通道板。掺杂金刚石膜的激活可以在硅上进行，但不能在玻璃MCP上进行，它提供了可控的条带电阻和非常长的二次发射表面。由于硅和金刚石的高温性能，用于掠入射的X射线光电阴极可以直接沉积在MCP表面上。这使得与现有的成像X射线探测器相比，具有寿命长、抗辐射能力强、时空分辨率高、缺陷少、工作温度高、X射线探测效率高的紧凑型成像X射线探测器。硅/金刚石微通道板(N4CP)X射线探测器将在医学成像、X射线检查和科学仪器方面带来新的应用，特别是在具有全电子图像读出的高速下。与性能较低的玻璃MCP相比，其成本可能非常有竞争力。