Acquisition of a Workhorse Electron Beam Lithography System for Microstructured Materials and Devices Research

采购用于微结构材料和器件研究的主力电子束光刻系统

• 批准号: 0079628
• 负责人: Xinsheng Ling
• 金额: $ 15.12万
• 依托单位: Brown University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-08-01 至 2002-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0079628&HistoricalAwards=false
• 关键词: Acquisition; Workhorse; Electron; Beam; Lithography

0079628Ling This projects involves the acquisition of a workhorse Electron Beam Lithography (EBL) system using the latest nanopositioning technology for microstructure materials and devices research and education at Brown University. The acquired system consists of a state-of-the-art scanning electron microscope and a Burleigh Inchworm Nanopositioning System as the sample stage. The system offers many of the capabilities, such as the generation of submicron features in a field of view of 25 mm, currently only offered by the multimillion-dollar EBL machines at a small fraction of the cost. A large group of experimentalists at Brown University conduct experimental research at the frontiers of microstructured materials and devices. This workhorse EBL instrument will greatly enhance the research productivity for the existing research programs in condensed matter physics, liquid crystal display technology, small semiconductor devices, novel magnetoelectronics, semiconductor lasers, and experimental cosmology, and open up new exciting research directions, will have a major impact on the materials research and education and will benefit a large number of graduate and undergraduate students at Brown University. This project involves the acquisition of a workhorse Electron Beam Lithography (EBL) system using the latest Burleigh Inchworm nanopositioning technology for micro and nano structured materials and devices research and education at Brown University. The EBL is the state-of-the-art nanotechnology which has revolutionized many areas of science and technology. A large group of experimentalists at Brown University conduct experimental research at the frontiers of microstructured materials and devices. Graduate and undergraduate students at Brown will use the EBL system to fabricate artificially designed patterns for fundamental studies of colloidal crystallization, for applied research in ultrafast transistors and novel magnetoelectronic devices, and for exploring novel liquid crystal materials and for developing sensors for cosmology experiment. The acquired EBL system offers many of the capabilities, such as generating submicron features in a large field of view, currently only offered by the multimillion-dollar EBL machines at a small fraction of the cost. This low-cost EBL system will be housed in the Barus-Holley Building where all physicists and engineers at Brown are working. This instrument will greatly enhance the research productivity for the existing research programs, and open up new exciting research directions, will have a major impact on the materials research and education at Brown and will benefit a large number of graduate and undergraduate students.

0079628 Ling该项目涉及购买一个主力电子束光刻（EBL）系统，该系统使用最新的纳米定位技术，用于布朗大学的微结构材料和器件研究和教育。 所获得的系统由最先进的扫描电子显微镜和作为样品台的Burleigh Inchworm纳米定位系统组成。该系统提供了许多功能，例如在25 mm的视场内生成亚微米特征，目前只有数百万美元的EBL机器才能提供，成本只有成本的一小部分。布朗大学的一大群实验学家在微结构材料和器件的前沿进行实验研究。这台主力EBL仪器将大大提高凝聚态物理、液晶显示技术、小型半导体器件、新型磁电子学、半导体激光器和实验宇宙学等现有研究计划的研究生产力，并开辟新的令人兴奋的研究方向，将对材料研究和教育产生重大影响，并将使布朗大学的大量研究生和本科生受益。该项目涉及购买一个主力电子束光刻（EBL）系统，该系统使用最新的Burleigh Inchworm纳米定位技术，用于布朗大学的微纳米结构材料和器件研究和教育。 EBL是最先进的纳米技术，它彻底改变了许多科学和技术领域。布朗大学的一大群实验学家在微结构材料和器件的前沿进行实验研究。 布朗大学的研究生和本科生将使用EBL系统制造人工设计的图案，用于胶体结晶的基础研究，用于超快晶体管和新型磁电子器件的应用研究，以及探索新型液晶材料和开发宇宙学实验传感器。收购的EBL系统提供了许多功能，例如在大视场中生成亚微米特征，目前只有数百万美元的EBL机器才能提供这些功能，而成本只是成本的一小部分。 这个低成本的EBL系统将被安置在Barus-Holley大楼，布朗大学的所有物理学家和工程师都在那里工作。 该仪器将大大提高现有研究项目的研究生产力，开辟新的令人兴奋的研究方向，将对布朗大学的材料研究和教育产生重大影响，并将使大量研究生和本科生受益。