Development of a Multi-Spectral Fluid/Solid Micro-Motion Measurement System

我们建议开发一种高速成像系统，能够测量微机械系统内固体表面和流体元素的运动。该系统的独特之处在于，它将能够在近红外下工作——这种能力使它能够穿透硅衬底，并进入复杂的微机械设备的内部腔室。这将首次实现对微机械设备的运动学和动力学以及复杂微机械系统内流体运动的高速测量。该仪器的应用将包括测量微设备操作（阀门，泵，加速度计，陀螺仪等），直接测量微观几何形状内部的流体行为，其中由于硅表面的介入，无法进行可见成像。仪器开发包括装配用于红外显微镜的定制硬件和与非线性光参量振荡器（opo）一起工作的激光照明。它们产生两个非常短的激光脉冲（每个4纳秒）。生成的图像由一对近红外焦平面阵列捕获，并下载到数字信号处理板（DSP）进行实时处理并在主机PC上显示。定制信号处理软件将实现三种操作模式：固体运动测量，固体变形测量和流体运动测量。

We propose the development of a high-speed imaging system capable ofmeasuring the motion of both solid surfaces and fluid elements inside amicromachined system. The system is unique in that it will be capable ofoperating both in the near infrared - a capability that allows it to seethrough silicon substrates and into the inner chambers of complexmicromachined devices. This will enable, for the first time, high-speedmeasurements of the kinematics and dynamics of micromachined devices and themotion of fluids inside complex micromachined systems. Applications of thisinstrument will include measurement of micro device operation (valves,pumps, accelerometers, gyroscopes, etc), direct measurement of fluidbehavior inside micro-geometries where visible imaging is not possible dueto intervening silicon surfaces.The instrument development includes the assembly of custom hardware forinfrared microscopy and illumination with lasers operating in conjunctionwith nonlinear Opto-Parametric Oscillators (OPOs). These create two veryshort laser pulses (4 ns each). The resultant image is captured by a pairof near-IR focal plane arrays and downloaded to a Digital Signal ProcessingBoard (DSP) for real-time processing and display on a host PC. Customsignal processing software will enable three modes of operation: solidmotion measurement, solid deformation measurement and fluid motionmeasurement.