Development of a Multi-Spectral Fluid/Solid Micro-Motion Measurement System

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We propose the development of a high-speed imaging system capable ofmeasuring the motion of both solid surfaces and fluid elements inside amicromachined system. The system is unique in that it will be capable ofoperating both in the near infrared - a capability that allows it to seethrough silicon substrates and into the inner chambers of complexmicromachined devices. This will enable, for the first time, high-speedmeasurements of the kinematics and dynamics of micromachined devices and themotion of fluids inside complex micromachined systems. Applications of thisinstrument will include measurement of micro device operation (valves,pumps, accelerometers, gyroscopes, etc), direct measurement of fluidbehavior inside micro-geometries where visible imaging is not possible dueto intervening silicon surfaces.The instrument development includes the assembly of custom hardware forinfrared microscopy and illumination with lasers operating in conjunctionwith nonlinear Opto-Parametric Oscillators (OPOs). These create two veryshort laser pulses (4 ns each). The resultant image is captured by a pairof near-IR focal plane arrays and downloaded to a Digital Signal ProcessingBoard (DSP) for real-time processing and display on a host PC. Customsignal processing software will enable three modes of operation: solidmotion measurement, solid deformation measurement and fluid motionmeasurement.