SGER: Characterization of InP as a MEMS Material for the Development of Micro-Electro-Mechanical Lossless Cross-Connect Waveguide Switch

SGER：InP 作为 MEMS 材料的表征，用于开发微机电无损交叉连接波导开关

• 批准号: 0107195
• 负责人: Reza Ghodssi
• 金额: $ 5.7万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-03-01 至 2003-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0107195&HistoricalAwards=false
• 关键词: SGER; Characterization; InP; MEMS; Material

We envision the development of an innovative optical cross-connect switch based on mechanical transducers for switching between optical waveguides as shown in Figure 1. It consists of 4 input fibers connected to 4 input waveguides on the switch. At each of the interconnect points, a microactivated micro-stage can be moved along a 45 axis to allow for steering the beam at 90 with respect to the original direction. In this way, any inputs can be steered to any outputs in a non-blocking way. Contrary to what is typically done in the area of micro-opto-electro-mechanical systems, the mechanical movements of the switch are not implemented using silicon technology but are directly realized in III-V compound semiconductors [1]. This has the important advantage of permitting the monolithic integration of active (i.e. semiconductor lasers, SOA, etc.) and passive waveguide devices (like the WDM filters, arrayed waveguide gratings) with the switching fabric. It can be envisioned that this should lead to complex wavelength cross-connect systems on a single chip. Switching time will be optimized by minimizing the mass of the moving parts and by reducing the required displacements to distances of the order of 3 microns. Dissipation of activated in one of its possible states. On the 4 output waveguides, SOA's are monolithically integrated to compensate for optical losses in the same way that we recently demonstrated a lossless 1 x 2 splitter. A passive-active resonant coupler to move the mode from a passive waveguide to a vertically positioned active waveguide using the PARC platform technology [2] can be used for the integration.

我们设想开发一种基于机械换能器的创新光交叉连接开关，用于在光波导之间切换，如图1所示。 它由连接到开关上的4个输入波导的4个输入光纤组成。 在每个互连点处，微激活的微平台可以沿45 °轴沿着移动，以允许相对于原始方向在90 °处操纵光束。 通过这种方式，可以以非阻塞方式将任何输入引导到任何输出。 与微光机电系统领域的典型做法相反，开关的机械运动不是使用硅技术实现的，而是直接在III-V族化合物半导体中实现的[1]。这具有允许有源（即半导体激光器、SOA等）器件的单片集成的重要优点。以及具有交换结构的无源波导器件（如WDM滤波器、阵列波导光栅）。 可以设想，这将导致在单个芯片上的复杂波长交叉连接系统。 切换时间将通过最小化移动部件的质量和通过将所需位移减少到3微米量级的距离来优化。 在一种可能的状态中被激活的耗散。 在4个输出波导上，SOA是单片集成的，以补偿光损耗，与我们最近演示的无损1 x 2分路器相同。 使用PARC平台技术[2]将模式从无源波导移动到垂直定位的有源波导的无源-有源谐振耦合器可用于集成。