The Acquisition of Laboratory Equipment to Facilitate Micro and Nano Engineering at Michigan State University

最近，在密歇根州立大学（MSU）工程学院内，具有微米和纳米尺寸研究兴趣的教师已经联合起来，开展了一项名为微米和纳米工程中心（MNEC）的新的工程学院中心研究活动。MNEC建立在工程学院内教师过去强大的研究能力基础上，如碳基材料和等离子体技术，并将其与新聘请的研究人员及其在纳米器件技术方面的相关研究计划相结合，微型化毫米波和光学系统以及微/纳米机器仪器。MNEC的使命是关注前沿知识和技术的应用，这些知识和技术可以合成、表征、操纵和修改材料，以创建集成结构，电子和光子器件以及微纳环境中的机器。该中心的研究活动的重点是在微米和纳米世界的新设备，机器和系统的开发。教师形成协同跨学科的研究团队，其中包括跨校园和多所大学的合作。其中值得注意的是NSFMRSEC传感器材料中心和NSF无线集成微系统（WIMS）ERC合作。此外，MNEC的研究活动提供了大学环境，培训和教育研究生和本科生。目前，中心有教师10人，研究生40人，其中博士生占一半以上。学生在十名教师中，有五名是在过去五年中新聘请的，预计在未来五年内，通过额外的教师兴趣重新定位和新的方式，将扩大到15 - 20名教师。MNEC的研究活动已经并将继续转移到工业领域，并将其商业化应用于与制造业，医疗保健，环境和国家安全相关的应用。微/纳米制造技术的快速发展需要我们不断重新评估我们的设施和能力。微型技术已经成为美国乃至全世界重要的经济驱动力。密歇根州立大学的MNEC教师开创了几个重要的微制造技术，包括微波等离子体加工机foretching和金刚石沉积，IC兼容的金刚石加工和制造技术，和金刚石微机电系统（MEMS）。现在，随着我们进入新的千年，纳米级技术对中心、学院、大学和国家变得越来越重要。本提案中要求的仪器将提高中心教师在纳米尺度和微米尺度技术方面开展研究活动和学生培训的能力。在过去的一年中，通过中心教师之间的许多战略规划讨论，已经建立了中心具体的新的长期目标。目前和发展中的微纳米工程研究活动在MNEC可以描述和组织成五个领域，包括：（1）碳基技术，（2）微波等离子体技术，（3）nanodevicetechnology，（4）操纵和探针技术的微纳米应用，和（5）小型化毫米波和光学系统。下面描述的拟议设备采购是MNEC多年战略的一部分，以改善其实验室设施，这将促进这五个领域的研究活动和学生培训。在制定我们的要求时，我们考虑了校园内类似仪器的可用性和此类仪器的能力。本提案中要求的设备将被安置在位于密歇根州立大学校园内的微纳米工程中心（MNEC）洁净室的公共设施中。本建议书中要求的仪器包括以下系统：等离子体增强化学气相沉积（PECVD）系统多道物理气相沉积（PVD）系统扫描探针显微镜湿化学处理站电化学电镀站

Recently within the College of Engineering at Michigan State University (MSU) facultywith research interests at the micro and nano dimensions have coalesced about a new College ofEngineering Center research activity entitled the Micro and Nano Engineering Center (MNEC).MNEC builds upon the past strong research capabilities of faculty within the College ofEngineering, such as carbon-based materials and plasma technologies and combines them withnewly hired research faculty and their associated research initiatives in nano-device technologies,miniaturized millimeter wave and optical systems and micro/nano machine instrumentation.MNEC's mission is concerned with the application of frontier knowledge and techniques thatsynthesize, characterize, manipulate and modify materials in order to create integrated structures,electronic, and photonic devices and machines in the micro and nano environment. The emphasisof the Center's research activities is the development of novel devices, machines and systems inthe micro and nano world. Faculty form synergistic interdisciplinary research teams whichinclude cross-campus and multi-university collaborations. Notable among these are the NSFMRSEC Center for Sensor Materials and the NSF Wireless Integrated Microsystems (WIMS)ERC collaborations. Additionally, MNEC's research activities provide the university setting inwhich to train and educate both graduate and undergraduate students. Presently, the Centerincludes ten faculty and 40 graduate students of which over half are Ph.D. students. Of the tenfaculty, five have been newly hired during the past five years and it is anticipated to expand to atotal of 15-20 faculty over the next five years via additional faculty interest reorientation and newhires. MNEC's research activities have been and continue to be transferred to industry andcommercialized into applications relevant to manufacturing, health care, the environment andnational security.The rapid advance of micro/nano-fabrication technology requires continual reassessment ofour facilities and capabilities. Micro-scale technology has been an important economic driver forthe United States as well as the entire world. MSU's MNEC faculty have pioneered severalimportant micro-fabrication technologies, including microwave plasma processing machines foretching and diamond deposition, IC-compatible diamond processing and fabrication techniques,and diamond micro electro-mechanical systems (MEMS). Now, as we enter a new millennium,nano-scale technology is becoming increasingly important to the center, the college, theuniversity, and the nation. The instrumentation requested in this proposal will improve theCenter's faculty ability to perform research activities and student training in nano-scale andmicro-scale technologies.Specific, new long-term goals of the Center have been established over the past year throughmany strategic planning discussions amongst the Center faculty. Current and developing microand nano-engineering research activities in MNEC can be described and organized into five areasincluding: (1) carbon-based technology, (2) microwave plasma technology, (3) nanodevicetechnology, (4) manipulation and probe technology for micro and nano applications, and (5)miniaturized millimeter wave and optical systems. The proposed equipment acquisition describedbelow is part of the MNEC's multiyear strategy to improve its laboratory facilities, which willfacilitate research activities and student training in these five areas. In developing our request, wehave considered the availability of similar instrumentation on campus and the capabilities of suchinstrumentation. The equipment requested in this proposal will be housed in common facilities inthe Micro and Nano Engineering Center (MNEC) cleanroom located on the MSU campus. Theinstrumentation requested in this proposal includes the following systems: Plasma Enhanced Chemical Vapor Deposition (PECVD) System Multisource Physical Vapor Deposition (PVD) System Scanning Probe Microscope Wet Chemical Processing Station Electrochemical Plating Station