Hands-on MEMS

MEMS 实践

• 批准号: 0230556
• 负责人: Ken Chin
• 金额: $ 30.23万
• 依托单位: New Jersey Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-02-01 至 2007-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0230556&HistoricalAwards=false
• 关键词: Hands; MEMS

Educational institutions, particularly those without access to clean room facilities, findit difficult to offer a course that exposes students to the concepts of MEMS micro fabrication and MEMS-based devices. This project is developing educational materials that provide students with MEMS devices for characterization and study, and instructors with easy-to-use course and training materials. This full-scale development is based on a prototype course offered during Spring 2001 and 2002 at NJIT and ColumbiaUniversity. Specifically, the product is a laboratory kit for hands-on MEMS exploration that includes 1) a polished set of experiments built upon the existing prototype activities, 2) a set of MEMS devices for testing, and wafers to illustrate key process steps, 3) easy- to-use device packaging or mounting hardware, 4) a supplemental process and device illustration/simulation software tool to further illustrate design and processing, 5) teacher training and lecture materials and exemplary reports, and 6) recommended equipment and software platforms for each device type. Including actual MEMS devices in the kit is perhaps the most novel aspect of the proposed program, but necessary if hands-on MEMS is to be accessible to a wide audience. The product is being beta tested at six partner universities, including small schools with small programs, to help insure appropriateness for national dissemination. Furthermore, a commercialization partner has been identified and has agreed to help develop a product that can be distributed nationally through their network of major dealers.

教育机构，特别是那些没有洁净室设施的教育机构，很难提供一门课程，让学生了解MEMS微制造和基于MEMS的器件的概念。该项目正在开发教育材料，为学生提供MEMS器件的表征和研究，并为教师提供易于使用的课程和培训材料。这个全面的开发是基于2001年春季和2002年春季在新泽西理工大学和哥伦比亚大学提供的一个原型课程。具体来说，该产品是一个实验室套件，用于动手MEMS探索，包括1)建立在现有原型活动基础上的一套完善的实验，2)一套用于测试的MEMS器件，以及用于说明关键工艺步骤的晶圆，3)易于使用的器件封装或安装硬件，4)补充工艺和器件说明/模拟软件工具，以进一步说明设计和加工，5)教师培训和讲座材料和示范报告。6)每种设备类型推荐的设备和软件平台。在套件中包含实际的MEMS器件可能是拟议计划中最新颖的方面，但如果要让广大受众接触到实际的MEMS，这是必要的。该产品正在六所合作大学进行beta测试，其中包括拥有小型项目的小型学校，以帮助确保在全国范围内传播的适宜性。此外，已经确定了一个商业化伙伴，并同意帮助开发一种可通过其主要经销商网络在全国销售的产品。