NIRT: Science and Technology of Ultrananocrystalline Diamond Films for Multifunctional MEMS/NEMS Devices

NIRT：超非晶金刚石滤膜的科学与技术用于多功能MEMS/NEMS开发这个为期三年的NIRT项目的目标是研究一种名为超非晶金刚石(UNCD)的新型多功能材料的微结构-机械-电子传输性能关系，并将其应用于新型微电子机械系统(MEMS)和纳米电子机械系统(NEMS)。虽然硅在20世纪的微电子革命中一直是主导材料，但各种形式的碳，特别是金刚石，可能是21世纪的主导材料；尤其是在目前正在进行的MEMS/NEMS革命中。该团队最近开发的新的化学气相沉积方法使UNCD薄膜的制备成为可能，这些薄膜具有独特而突出的性能，如高硬度、高断裂强度、高杨氏系数、极低的摩擦系数和高耐磨性、可忽略的粘滞、沉积薄膜中的低残余应力、独特的场电子发射性能、广泛的由微结构和掺杂控制的导电性以及高共形薄膜，这些都对新型MEMS/NEMS应用的发展至关重要。通过来自西北大学(NU)、伊利诺伊大学芝加哥分校(UIC)和密苏里哥伦比亚大学(UMC)的团队成员与Argonne和Sandia国家实验室(ANL和SNL)的合作，提出了一个集实验、分析和计算于一体的计划，主要研究课题如下：1.扫描探针显微镜方法，包括导电原子力显微镜和超高真空扫描隧道显微镜/光谱学，用于纳米尺度的UNCD薄膜的表面结构和导电性表征，这将使人们能够确定不同掺杂制备的薄膜的微结构；2.利用最新开发的薄膜偏转实验，在微观水平和纳米水平上，利用可现场操作表面探针和电子显微镜的新型MEMS加载装置，研究了不同掺杂程度的UNCD的力学性能，如杨氏模量、硬度、塑性和断裂；通过分子/连续介质相结合的建模和模拟方法研究了UNCD薄膜的纳米结构与机电性能之间的关系，为在纳米尺度上理解UNCD薄膜的尺寸-晶界化学与机电性能之间的关系提供了一种跨学科的方法。特别是获得了适合于揭示UNCD电子传导机制的原子尺度信息及其微观结构对这一现象的影响，可以为MEMS/NEMS器件的设计提供积极的参考。在这方面，将与国家实验室和行业合作开发以下两个应用程序：o用于导电原子力显微镜(AFM)的具有UNCD提示的悬臂阵列，用于无线通信和其他电子扫描应用的由UNCD导电薄膜制成的ANDO MEMS开关/纳米谐振器。这项NIRT的教育部分包括以下部分，它们可能影响纳米科学和工程的多层次教与学过程：与社区大学和高中的教育工作者进行外联：将在微纳技术领域的夏季讲习班期间编写教材。研究生和本科生的研究经验：与北卡罗来纳大学的另外两个主要项目NSF-NSEC和MRSEC以及国家实验室合作，本科生参与者将在夏季进行为期九周的全日制研究。特别是，将进行ANL的协调旅游和频繁的小组会议，以允许参与这个NIRT项目的研究生和本科生之间的互动。

NIRT: SCIENCE AND TECHNOLOGY OF ULTRANANOCRYSTALLINE DIAMOND FILMSFOR MULTIFUNCTIONAL MEMS/NEMS DEVICESThe objectives of this three-year NIRT project are to investigate microstructure-mechanical-electronic transport property relationships of a new multifunctional material designated as ultrananocrystalline diamond (UNCD), and to utilize this material in novel microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). While silicon has been the dominant material in the microelectronics revolution of the 20 th Century, carbon in its various forms, especially diamond, may be a dominant material in the 21 st Century; particularly, in the MEMS/NEMS revolution currently underway.New methods of chemical vapor deposition recently developed by this team make possible themanufacturing of the UNCD films that exhibit unique and outstanding properties such as high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited thin films, unique field electron-emission properties, a wide range of conductivity controlled by microstructure and doping, and highly conformal films, which are all crucial to the development of novel MEMS/NEMS applications. Through interdisciplinary efforts of the team members from Northwestern University (NU), University of Illinois at Chicago (UIC) and University of Missouri-Columbia (UMC), in collaboration with Argonne and Sandia National Laboratories (ANL and SNL), an integrated experimental, analytical and computational program is proposed here with the following main research topics:1. Scan probe microscopy approaches, including conductive atomic force microcopy and ultra high vacuum scanning tunneling microscopy/spectroscopy, for nanoscale characterization of surface structure and conductivity of UNCD films, that will enable the microstructure to be ascertained for films made with various dopings;2. Investigation of mechanical properties, such as Young's modulus, hardness, plasticity, and fracture, of UNCD with varying degrees of doping, at the microlevel using a recently developed membrane deflection experiment, and at the nanolevel by means of a novel MEMS loading device that can operate in-situ surface probe and electron microscopes; and3. Study of the relationship between nanostucture and electro-mechanical properties of UNCD films via modeling and simulation with combined molecular/continuum approaches.The above interdisciplinary research efforts would make an intellectual contribution to understanding the relationship between grain size-grain boundary chemistry and electro-mechanical properties of UNCD at the nanoscale. In particular, the atomic-scale information suitable to unraveling the electronic conduction mechanism in UNCD and the effect of its microstructure on this phenomenon will be obtained, which can be positively used to design MEMS/NEMS devices. In this regard, the following two applications will be developed in collaboration with national laboratories and industry:o Arrays of cantilevers with UNCD tips for conductive atomic force microscopy (AFM), ando MEMS switches/Nanoresonators made of conductive UNCD membranes for wireless communication and other electronic scanning applications.The educational part of this NIRT includes the following components, which could impact the multi-level teaching-learning process in nanoscale science and engineering: Outreach to educators from community colleges and high schools: Teaching materials will bedeveloped during a summer workshop in the area of micro and nano technologies. Research Experience for Graduate and Undergraduate Students: In collaboration with two other major programs at NU, NSF-NSEC and MRSEC, and with national laboratories, undergraduate participants will engage in full-time research for a nine-week period over the summer. In particular, coordinated tours to ANL and frequent group meetings will be made to allow for the interaction among graduate and undergraduate students involved in this NIRT program.