NIRT: Science and Technology of Ultrananocrystalline Diamond Films for Multifunctional MEMS/NEMS Devices

NIRT：用于多功能MEMS/NEMS器件的超微晶金刚石薄膜的科学与技术这个为期三年的NIRT项目的目标是研究一种被称为超微晶金刚石（UNCD）的新型多功能材料的微观结构-机械-电子输运性质关系，并将这种材料应用于新型微机电系统（MEMS）和纳米机电系统（NEMS）。硅是20世纪微电子革命的主要材料，而碳的各种形态，尤其是金刚石，可能是21世纪的主要材料；特别是目前正在进行的MEMS/NEMS革命。该团队最近开发的化学气相沉积新方法使UNCD薄膜的制造具有独特而卓越的性能，如高硬度、高断裂强度、高杨氏模量、极低摩擦系数和高耐磨性、可忽略的粘性、沉积薄膜的低残余应力、独特的场电子发射性能、由微观结构和掺杂控制的大范围电导率。以及高保形薄膜，这些都是开发新型MEMS/NEMS应用的关键。通过西北大学（NU）、伊利诺伊大学芝加哥分校（UIC）和密苏里大学哥伦比亚分校（UMC）团队成员的跨学科努力，与阿贡国家实验室和桑迪亚国家实验室（ANL和SNL）合作，提出了一个综合实验、分析和计算的项目，主要研究课题如下：扫描探针显微镜方法，包括导电原子力显微复制和超高真空扫描隧道显微镜/光谱学，用于纳米级表征UNCD薄膜的表面结构和电导率，这将使人们能够确定不同掺杂的薄膜的微观结构；研究不同掺杂程度的UNCD的力学性能，如杨氏模量、硬度、塑性和断裂，在微观层面上使用最近开发的膜挠曲实验，在纳米层面上使用可操作原位表面探针和电子显微镜的新型MEMS加载装置；说谎。采用分子/连续介质相结合的方法对UNCD薄膜的纳米结构与电力学性能的关系进行建模和仿真研究。上述跨学科的研究工作将有助于在纳米尺度上理解UNCD晶粒尺寸-晶界化学与机电性能之间的关系。特别是，将获得适合揭示UNCD中电子传导机制的原子尺度信息及其微观结构对这一现象的影响，可以积极地用于MEMS/NEMS器件的设计。在这方面，将与国家实验室和工业界合作开发以下两种应用：o用于导电原子力显微镜（AFM）的带有UNCD尖端的悬臂阵列，以及用于无线通信和其他电子扫描应用的由导电UNCD膜制成的MEMS开关/纳米谐振器。该NIRT的教育部分包括以下组成部分，这可能会影响纳米尺度科学和工程的多层次教学过程：向社区大学和高中的教育工作者伸出援手：教材将在微纳米技术领域的夏季研讨会期间开发。研究生和本科生的研究经历：本科生将与西北大学NSF-NSEC和MRSEC两个主要项目以及国家实验室合作，在夏季进行为期九周的全日制研究。特别是，将安排赴美国国家实验室的协调之旅和频繁的小组会议，以便参与该NIRT计划的研究生和本科生之间进行互动。

NIRT: SCIENCE AND TECHNOLOGY OF ULTRANANOCRYSTALLINE DIAMOND FILMSFOR MULTIFUNCTIONAL MEMS/NEMS DEVICESThe objectives of this three-year NIRT project are to investigate microstructure-mechanical-electronic transport property relationships of a new multifunctional material designated as ultrananocrystalline diamond (UNCD), and to utilize this material in novel microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). While silicon has been the dominant material in the microelectronics revolution of the 20 th Century, carbon in its various forms, especially diamond, may be a dominant material in the 21 st Century; particularly, in the MEMS/NEMS revolution currently underway.New methods of chemical vapor deposition recently developed by this team make possible themanufacturing of the UNCD films that exhibit unique and outstanding properties such as high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited thin films, unique field electron-emission properties, a wide range of conductivity controlled by microstructure and doping, and highly conformal films, which are all crucial to the development of novel MEMS/NEMS applications. Through interdisciplinary efforts of the team members from Northwestern University (NU), University of Illinois at Chicago (UIC) and University of Missouri-Columbia (UMC), in collaboration with Argonne and Sandia National Laboratories (ANL and SNL), an integrated experimental, analytical and computational program is proposed here with the following main research topics:1. Scan probe microscopy approaches, including conductive atomic force microcopy and ultra high vacuum scanning tunneling microscopy/spectroscopy, for nanoscale characterization of surface structure and conductivity of UNCD films, that will enable the microstructure to be ascertained for films made with various dopings;2. Investigation of mechanical properties, such as Young's modulus, hardness, plasticity, and fracture, of UNCD with varying degrees of doping, at the microlevel using a recently developed membrane deflection experiment, and at the nanolevel by means of a novel MEMS loading device that can operate in-situ surface probe and electron microscopes; and3. Study of the relationship between nanostucture and electro-mechanical properties of UNCD films via modeling and simulation with combined molecular/continuum approaches.The above interdisciplinary research efforts would make an intellectual contribution to understanding the relationship between grain size-grain boundary chemistry and electro-mechanical properties of UNCD at the nanoscale. In particular, the atomic-scale information suitable to unraveling the electronic conduction mechanism in UNCD and the effect of its microstructure on this phenomenon will be obtained, which can be positively used to design MEMS/NEMS devices. In this regard, the following two applications will be developed in collaboration with national laboratories and industry:o Arrays of cantilevers with UNCD tips for conductive atomic force microscopy (AFM), ando MEMS switches/Nanoresonators made of conductive UNCD membranes for wireless communication and other electronic scanning applications.The educational part of this NIRT includes the following components, which could impact the multi-level teaching-learning process in nanoscale science and engineering: Outreach to educators from community colleges and high schools: Teaching materials will bedeveloped during a summer workshop in the area of micro and nano technologies. Research Experience for Graduate and Undergraduate Students: In collaboration with two other major programs at NU, NSF-NSEC and MRSEC, and with national laboratories, undergraduate participants will engage in full-time research for a nine-week period over the summer. In particular, coordinated tours to ANL and frequent group meetings will be made to allow for the interaction among graduate and undergraduate students involved in this NIRT program.