NIRT: Science and Technology of Ultrananocrystalline Diamond Films for Multifunctional MEMS/NEMS Devices

NIRT：超纳米金刚石薄膜在多功能MEMS/NEMS器件中的应用本项目的目标是研究一种新型多功能材料--超纳米金刚石（ultransanocrystalline DIAMOND，UNCD）的微结构-力学-电子输运性质关系，并将其应用于新型微机电系统（MEMS）和纳机电系统（NEMS）。虽然硅已经是世纪微电子革命中的主导材料，但各种形式的碳，尤其是金刚石，可能是21世纪的主导材料;特别是，在MEMS/NEMS革命目前正在进行中。该团队最近开发的化学气相沉积新方法使制造UNCD薄膜成为可能，这些薄膜具有独特和出色的性能，如高高硬度、高断裂强度、高杨氏模量、极低的摩擦系数和高耐磨性、可忽略的静摩擦力、沉积薄膜中的低残余应力、独特的场电子发射特性、由微结构和掺杂控制的宽范围的导电性以及高度保形的膜，这些对于新型MEMS/NEMS应用的开发都是至关重要的。通过来自西北大学（NU），伊利诺伊大学芝加哥分校（UIC）和密苏里-哥伦比亚大学（UMC）的团队成员的跨学科努力，与阿贡和桑迪亚国家实验室（ANL和SNL）合作，提出了一个集成的实验，分析和计算程序，主要研究课题如下：1。扫描探针显微镜方法，包括导电原子力显微镜和超高真空扫描隧道显微镜/光谱，用于UNCD膜的表面结构和导电性的纳米级表征，这将使微结构能够确定各种掺杂的膜;2.机械性能的调查，如杨氏模量，硬度，塑性和断裂，UNCD与不同程度的掺杂，在微观水平上使用最近开发的膜偏转实验，并在纳米水平上通过一种新的MEMS加载装置，可以操作在原位表面探针和电子显微镜;和3。结合分子/连续介质方法，通过建模和模拟研究UNCD薄膜的纳米结构和机电性能之间的关系。上述跨学科的研究工作将为理解纳米尺度下UNCD的晶粒尺寸-晶界化学和机电性能之间的关系做出智力贡献。特别是，将获得适合于解开UNCD中的电子传导机制及其微结构对这种现象的影响的原子尺度信息，这可以积极地用于MEMS/NEMS器件的设计。在这方面，将与国家实验室和工业界合作开发以下两种应用：用于导电原子力显微镜的带有UNCD尖端的杠杆阵列，以及用于无线通信和其他电子扫描应用的由导电UNCD膜制成的MEMS开关/纳米谐振器。将在微型和纳米技术领域的夏季讲习班期间编写教材。研究生和本科生的研究经验：与NU，NSF-NSEC和MRSEC的其他两个主要项目以及国家实验室合作，本科生参与者将在夏季进行为期九周的全职研究。特别是，协调的图尔斯参观ANL和频繁的小组会议将允许研究生和本科生参与这个NIRT计划之间的互动。

NIRT: SCIENCE AND TECHNOLOGY OF ULTRANANOCRYSTALLINE DIAMOND FILMSFOR MULTIFUNCTIONAL MEMS/NEMS DEVICESThe objectives of this three-year NIRT project are to investigate microstructure-mechanical-electronic transport property relationships of a new multifunctional material designated as ultrananocrystalline diamond (UNCD), and to utilize this material in novel microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). While silicon has been the dominant material in the microelectronics revolution of the 20 th Century, carbon in its various forms, especially diamond, may be a dominant material in the 21 st Century; particularly, in the MEMS/NEMS revolution currently underway.New methods of chemical vapor deposition recently developed by this team make possible themanufacturing of the UNCD films that exhibit unique and outstanding properties such as high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited thin films, unique field electron-emission properties, a wide range of conductivity controlled by microstructure and doping, and highly conformal films, which are all crucial to the development of novel MEMS/NEMS applications. Through interdisciplinary efforts of the team members from Northwestern University (NU), University of Illinois at Chicago (UIC) and University of Missouri-Columbia (UMC), in collaboration with Argonne and Sandia National Laboratories (ANL and SNL), an integrated experimental, analytical and computational program is proposed here with the following main research topics:1. Scan probe microscopy approaches, including conductive atomic force microcopy and ultra high vacuum scanning tunneling microscopy/spectroscopy, for nanoscale characterization of surface structure and conductivity of UNCD films, that will enable the microstructure to be ascertained for films made with various dopings;2. Investigation of mechanical properties, such as Young's modulus, hardness, plasticity, and fracture, of UNCD with varying degrees of doping, at the microlevel using a recently developed membrane deflection experiment, and at the nanolevel by means of a novel MEMS loading device that can operate in-situ surface probe and electron microscopes; and3. Study of the relationship between nanostucture and electro-mechanical properties of UNCD films via modeling and simulation with combined molecular/continuum approaches.The above interdisciplinary research efforts would make an intellectual contribution to understanding the relationship between grain size-grain boundary chemistry and electro-mechanical properties of UNCD at the nanoscale. In particular, the atomic-scale information suitable to unraveling the electronic conduction mechanism in UNCD and the effect of its microstructure on this phenomenon will be obtained, which can be positively used to design MEMS/NEMS devices. In this regard, the following two applications will be developed in collaboration with national laboratories and industry:o Arrays of cantilevers with UNCD tips for conductive atomic force microscopy (AFM), ando MEMS switches/Nanoresonators made of conductive UNCD membranes for wireless communication and other electronic scanning applications.The educational part of this NIRT includes the following components, which could impact the multi-level teaching-learning process in nanoscale science and engineering: Outreach to educators from community colleges and high schools: Teaching materials will bedeveloped during a summer workshop in the area of micro and nano technologies. Research Experience for Graduate and Undergraduate Students: In collaboration with two other major programs at NU, NSF-NSEC and MRSEC, and with national laboratories, undergraduate participants will engage in full-time research for a nine-week period over the summer. In particular, coordinated tours to ANL and frequent group meetings will be made to allow for the interaction among graduate and undergraduate students involved in this NIRT program.