Acquisition of an Infrared Ellipsometer for Materials Research and Student Training

采购红外椭偏仪用于材料研究和学生培训

• 批准号: 0315760
• 负责人: John Kouvetakis
• 金额: $ 15万
• 依托单位: Arizona State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-15 至 2005-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0315760&HistoricalAwards=false
• 关键词: Acquisition; Infrared; Ellipsometer; Materials; Research

This grant provides support for the acquisition of an infrared spectroscopic ellipsometer for materials research and student training at Arizona State University. The instrument will be equipped with a cryostat attachment allowing variable temperature operation. Such capability is extremely rare: the new instrument will be the first of its kind manufactured in the United States. A spectroscopic ellipsometer measures the real and imaginary parts of a material's index of refraction as a function of wavelength. In the infrared range of the spectrum, the dominant optical excitations are phonons (vibrations), plasmons (collective electronic oscillations) in doped materials, and band-to-band electronic excitations in narrow gap semiconductors. Accordingly, the new ellipsometer will play a key role in the characterization of oxides, ferroelectric materials, and semiconductors, areas of active research at Arizona State University and of great interest to industrial partners. Spectroscopic ellipsometry has significant advantages over light transmission or reflection experiments. The latter measure a single quantity at each wavelength (the intensity of the transmitted or reflected light), whereas ellipsometry measures the change in polarization of the light reflected at a surface. Because this change is characterized by an amplitude ratio and a phase shift (related to the reflection coefficients for light polarized in the plane and perpendicular to the plane of incidence),ellipsometry is highly accurate and reproducible, even for low light levels. In addition, it requires no reference sample, is less affected by sample scattering of light, and can be used to determine absolute values for the optical constants without independent thickness measurements. The project is expected to have a broad societal impact. One of its unique aspects will be the synergistic collaboration between ASU and industrial collaborators, who play a key role in the training of ASU personnel. Special emphasis will be placed on fostering scientific education. Funds are requested to support the operation of the instrument during the first year, and these funds will be expended primarily for the training of students. Industrial collaborators will play a key role in these activities, supervising students, providing samples, and teaching short courses on ellipsometry.

这笔赠款为亚利桑那州立大学购买红外光谱椭偏仪用于材料研究和学生培训提供支持。该仪器将配备一个低温恒温器附件，允许变温操作。这种能力是极其罕见的：这种新仪器将是第一个在美国制造的此类仪器。椭圆偏振光谱仪测量材料折射率的实部和虚部作为波长的函数。在红外光谱范围内，主要的光学激发是声子(振动)，掺杂材料中的等离子体(集体电子振荡)，以及窄禁带半导体中的带间电子激发。因此，新的椭偏仪将在氧化物、铁电材料和半导体的表征中发挥关键作用，这些领域是亚利桑那州立大学活跃的研究领域，也是工业合作伙伴非常感兴趣的领域。与光传输或反射实验相比，椭圆偏振光谱测量具有显著的优势。后者测量每个波长的单个量(透射光或反射光的强度)，而椭圆偏振测量法测量在表面反射的光的偏振变化。由于这种变化的特征是振幅比和相移(与在平面内偏振并垂直于入射平面的光的反射系数有关)，因此椭圆偏振测量具有很高的精确度和重复性，即使在弱光情况下也是如此。此外，它不需要参考样品，受样品光散射的影响较小，可以用于确定光学常数的绝对值，而不需要独立的厚度测量。该项目预计将产生广泛的社会影响。其独特的方面之一将是亚利桑那州立大学和行业合作者之间的协同合作，他们在亚利桑那州立大学人员的培训中发挥关键作用。将特别重视培养科学教育。请拨资金以支持该工具在第一年的运作，这些资金将主要用于培训学生。行业合作者将在这些活动中发挥关键作用，监督学生，提供样本，并教授椭偏测量方面的短期课程。