SBIR Phase I: Low Noise Scanning Thermal Microscopy for Defect Detection and Characterization of Semiconductor Materials

这个小企业创新研究（SBIR）第一阶段项目涉及扫描热显微镜（SThM）系统，可用于测量纳米技术，半导体和生物应用中的温度，热导率和热容等热参数。SThM系统包括一个微加工扫描探针，接口电路，扫描阶段，和仪器同步和控制各个组件。 该提案通过评估SThM系统作为一个整体的可制造性，鲁棒性，准确性，可重复性和易用性，并通过扩展潜在的applications.The工具的目的不仅是为研究人员使用，而且还为大学预科教育在纳米技术和微电子学的可行性作为一个商业产品解决了关键问题。它还用于生产应用中的成品率和可靠性的过程监控。 由于正在进行商业化评估的技术源于一个教育机构，并将获得该机构的许可，如果成功，这一努力将间接支持高等教育。这项工作也将为本科生提供一个途径，参与各种领域，从微细加工到电路设计，再到测试扫描热系统。

This Small Business Innovation Research (SBIR)Phase I project addresses a scanning thermal microscope (SThM) system, which can be used for measuring thermal parameters such as temperature, thermal conductance, and heat capacity in nanotechnology, semiconductor, and biological applications. The SThM system consists of a micromachined scanning probe, an interface circuit, a scanning stage, and instrumentation to synchronize and control the individual components. This proposal addresses critical issues regarding its feasibility as a commercial product by evaluating the manufacturability, robustness, accuracy, repeatability, and ease of use of the SThM system as a whole and by extending the potential applications.The tool is intended for use not only by researchers, but also for pre-college education in nanotechnology and microelectronics. It is also intended for use in process monitoring for yield and reliability in manufacturing applications. Since the technology being evaluated for commercialization originated in an educational institution and will be licensed from it, this effort will indirectly serve to support higher education if successful. This effort will also provide an avenue for undergraduate student involvement in a variety of areas ranging from microfabrication to circuit design to testing the scanning thermal systems.