SBIR Phase II: A High-Throughput Scanning Probe Microscope Using Micromachined Ultracompliant Probe Arrays with Embedded Sensors for Simultaneous Topography and Thermal Imag

这个小企业创新研究（SBIR）第二阶段项目旨在生产一种最先进的高通量扫描探针显微镜（HT-SPM）的商业原型，该显微镜可用于测量纳米技术，生物和半导体应用中的形貌和热参数。扫描探针显微镜已经是一个非常成功的工具，但重点还没有放在快速数据采集。HT-SPM是一项使能技术，包括一种用于提取地形的变革性专利方法，可实现更高的吞吐量。该项目利用了原子力显微镜（AFM）探针微制造和工业方面的经验。该SBIR项目的直接结果将是一个功能齐全和市场就绪的HT-SPM。纳米级器件和结构中的测量的更广泛的影响/商业潜力具有科学和工业重要性。虽然原子力显微镜（AFM）是纳米技术最重要的工具之一，但十多年来它的工作方式没有任何根本性的创新。该项目提供了一个从根本上不同的成像方式的结果更快的测量。更快的表征使制造商能够加快问题隔离，从而提高生产率和投资回报率（ROI）。HT-SPM还有利于研发、故障分析和离线工程。HT-SPM提供的关键功能将允许用户快速、清晰地测量纳米级的形貌/摩擦/温度，并查看关键特性。HT-SPM填补了集成电路、纳米技术、生命科学和其他依赖亚微米显微镜的市场的关键需求，因为它将为用户提供一个上级和廉价的测量系统，以帮助研究新的特性。

This Small Business Innovation Research (SBIR) Phase II project aims to produce a commercial prototype of a state-of-the-art high throughput scanning probe microscope (HT-SPM), which can be used for measuring topography and thermal parameters in nanotechnology, bio, and semiconductor applications. The scanning probe microscope has been a very successful tool, but emphasis has not been put on rapid data acquisition. The HT-SPM is an enabling technology that consists of a transformative and patented method for extracting topography which allows for higher throughput. The project leverages experience in atomic force microscope (AFM) probe micro-fabrication and industry. An immediate outcome of this SBIR project will be a fully functional and market ready HT-SPM. The broader impact/commercial potential of measurements in nanometer scale devices and structures have both scientific and industrial importance. Although the Atomic Force Microscope (AFM) is one of the most important tools for nanotechnology, there has not been any fundamental innovation in the way it operates for more than a decade. This project provides faster measurement as a result of a fundamentally different way of imaging. Faster characterization permits manufacturers to expedite problem isolation, leading to higher productivity and higher return-on-investment (ROI). The HT-SPM also benefits R&D, failure analysis and off-line engineering. The HT-SPM offers critical capabilities that will allow users too quickly and clearly measure topography/friction/temperature at the nanoscale and view critical characteristics. The HT-SPM fills a critical need in integrated circuits, nanotechnology, life sciences and other markets that rely on sub-micron microscopy, as it will provide users with a superior and inexpensive measurement system to aid in studying new properties.