SBIR Phase I: A High-Throughput Scanning Probe Microscope Using Micromachined Ultracompliant Probe Arrays with Embedded Sensors for Simultaneous Topography and Thermal Imaging

小型企业创新研究(SBIR)第一阶段项目将开发一种高通量扫描探针显微镜系统，用于测量纳米技术、生物和半导体应用中的地形和热参数。扫描探针显微镜中对更高吞吐量的需求将使用超柔性探针阵列来满足，其中多个尖端并行扫描，从而使得许多这样的阵列能够以最小的接触力同时在样品上操作，并且没有机械反馈。拟议的系统将提供更快的测量，从而有助于提高生产率和降低成本。此外，它还将有利于研发、故障分析和离线工程。

The Small Business Innovation Research (SBIR) Phase I project will develop a high throughput scanning probe microscopy system for measuring topography and thermal parameters in nanotechnology, bio and semiconductor applications. The need for higher throughput in scanning probe microscopy will be addressed using ultracompliant probe arrays in which multiple tips scan in parallel; thus, making it possible for many of these arrays to operate simultaneoulsy on a sample with minimal contact force and without mechanical feedback.The proposed technology will fill a critical need in markets that rely on sub-micron microscopy. The proposed system will provide faster measurements, thereby contributing to higher productivity and cost reduction. In addition, it will benefit R&D, failure analysis and off-line engineering.