MRI: Acquisition of Focused Ion Beam Tool for the USF Nanomanufacturing and Nanomaterials Research Center

MRI：为 USF 纳米制造和纳米材料研究中心采购聚焦离子束工具

• 批准号: 0421238
• 负责人: Rudiger Schlaf
• 金额: $ 32万
• 依托单位: University of South Florida
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2006-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0421238&HistoricalAwards=false
• 关键词: MRI; Acquisition; Focused; Ion; Beam

The objective of this research is the fabrication of a variety of nano-scale structures and the preparation of transmission electron microscopy samples using focused ion beam (FIB) to support several active research projects at the University of South Florida. Among the projects supported are directed assembly of carbon nanotube devices, the study of microstructure and fracture in thin films, the preparation and characterization of conducting semi-transparent inorganic and polymeric films, the investigation of reliability issues in interconnect layers, the fabrication and characterization of nanostructured hard coatings, the fabrication of light harvesting "rectenna" array prototypes, the fabrication of magnetic nanostructures, and the fabrication RF MEMS Switch prototypes.Broader Impacts: The proposed instrument will be installed in USF's new Nanotechnology building. This facility will provide all campus and the surrounding community with nanofabrication, materials processing, and analytical facilities. Due to its inherent versatility the proposed FIB tool will add a significant range of capabilities to USF's materials research infrastructure, enabling massively cross-disciplinary experiments previously difficult or impossible. This instrument will bring together several of the most significant materials research groups at USF's Engineering and Physics departments, facilitating experiments on new and innovative materials and device structures. The students of these groups and across campus will benefit from having a state-of-the-art research tool on their hands, allowing them to perform cutting edge research, and be involved in interdisciplinary experiments with their peers from other departments.

本研究的目的是制造各种纳米尺度的结构和使用聚焦离子束（FIB）的透射电子显微镜样品的制备，以支持南佛罗里达大学的几个活跃的研究项目。资助的项目包括碳纳米管器件的定向组装、薄膜中微观结构和断裂的研究、半透明无机和聚合物导电膜的制备和表征、互连层可靠性问题的研究、纳米结构硬涂层的制备和表征、集光“整流天线”阵列原型的制备、磁性纳米结构的制备、更广泛的影响：拟议的仪器将安装在USF的新纳米技术大楼。该设施将为所有校园和周围社区提供纳米纤维，材料加工和分析设施。由于其固有的多功能性，拟议的FIB工具将为USF的材料研究基础设施增加一系列重要的功能，使以前难以或不可能进行的大规模跨学科实验成为可能。该仪器将汇集USF工程和物理部门的几个最重要的材料研究小组，促进新的和创新的材料和器件结构的实验。这些团体和整个校园的学生将受益于拥有最先进的研究工具，使他们能够进行前沿研究，并与其他部门的同行参与跨学科实验。