MRI: Acquistion of Dual Beam FIB/SEM for Nanofabrication

MRI：获取用于纳米加工的双束 FIB/SEM

• 批准号: 0421543
• 负责人: Axel Scherer
• 金额: $ 70.08万
• 依托单位: California Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0421543&HistoricalAwards=false
• 关键词: MRI; Acquistion; Dual; Beam; FIB

0421543SchererThis proposed instrumentation acquisition is that of a dual-beam focused ion beam scanning electron microscope (FIB/SEM) system, with which the involved research team intends to investigate electromagnetic phenomena at the nanometer scale. The involved research 'team' includes three collaborative elements. CalTech will take the lead, JPL will provide supplemental input, and the FIB/SEM vendor (i.e., FEI Inc.) will not only furnish the basic hardware but will interactively assist CalTech students and faculty in their efforts with software optimization.

0421543 Scherer本次拟议的仪器采购是一个双束聚焦离子束扫描电子显微镜（FIB/SEM）系统，参与的研究团队打算用它来研究纳米尺度的电磁现象。参与研究的“团队”包括三个协作要素。加州理工学院将牵头，喷气推进实验室将提供补充输入，FIB/SEM供应商（即，FEI Inc.）将不仅提供基本的硬件，但将互动地协助加州理工学院的学生和教师在他们的努力与软件优化。