MRI: Acquistion of Dual Beam FIB/SEM for Nanofabrication
MRI: Acquistion of Dual Beam FIB/SEM for Nanofabrication
批准号:
0421543
负责人:
Axel Scherer
金额:
$70.08万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
2004
资助国家:
美国
项目状态:
已结题
起止时间:
2004-09-01 至 2006-08-31
中文摘要
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英文摘要
0421543SchererThis proposed instrumentation acquisition is that of a dual-beam focused ion beam scanning electron microscope (FIB/SEM) system, with which the involved research team intends to investigate electromagnetic phenomena at the nanometer scale. The involved research 'team' includes three collaborative elements. CalTech will take the lead, JPL will provide supplemental input, and the FIB/SEM vendor (i.e., FEI Inc.) will not only furnish the basic hardware but will interactively assist CalTech students and faculty in their efforts with software optimization.
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海外基金