SST: Control-oriented Optimal Multisensor Design and Microfabrication for Structural Vibration Suppression in Mechatronic Systems (GOALI)

摘要0428917 Robotp HorowitzUniv加州大学/伯克利在本项目中，使用磁性硬盘驱动器作为背景来检查传感器开发中的两个问题。首先，柔性结构的闭环和减振控制需要多少个传感器，它们的最佳位置是什么？第二，如何将微尺度应变和振动传感器制造技术融入传统制造环境？新的面向控制的技术将被开发用于机电系统中用于减振控制和监测的多个传感器的集成设计、制造和放置，并与钢衬底上的MEMS传感器制造技术相结合来开发这种技术。和记黄埔科技有限公司(HTI)是该项目的工业合作伙伴，该公司将把制造的基板与成品传感器组装成用于磁性硬盘驱动器的原型仪表悬浮液。这些仪表化悬架将被整合到带有MEMS微执行器的双级伺服系统中，用于评估其性能。该项目将为学生提供学习机电一体化设计方法的机会，该方法将控制系统理论设计和分析方法与CAD、有限元和机械设计优化方法紧密结合，同时开发新的MEMS加工技术，将传感器嵌入到金属机械设备中。这是由传感器倡议NSF 04-522支持的GALI项目。

Abstract0428917Robotp HorowitzUniv Calif/BerkeleyIn this project magnetic hard disk drives are used as the context to examine two problems in sensor development. First, how many sensors are necessary and what are their optimal placements for closed-loop and vibration suppression control of a flexible structure? Second, how can micro-scaled strain and vibration sensor fabrication techniques be incorporated into traditional manufacturing environments? Novel control-oriented techniques for the integrated design, fabrication and placement of multiple sensors for vibration suppression control and monitoring in mechatronic systems will be developed and integrated with MEMS sensor fabrication techniques on steel substrates to develop such a technology. Hutchison Technologies Inc. (HTI), the industrial partner in this project, will assemble the fabricated substrates with the finished sensors into prototype-instrumented suspensions for magnetic hard disk drives. These instrumented suspensions will be incorporated into dual-stage servo systems with MEMS microactuators already fabricated by the project research team, for evaluation of their performance.The project will provide students with the opportunity to learn mechatronic design approaches that cohesively integrate control systems theoretic design and analysis methodologies with CAD, FEM and mechanical design optimization methodologies, while simultaneously developing new MEMS processing techniques for embedding sensors into metal-mechanic devices.This is GOALI project supported under Sensors Initiative NSF 04-522.