MEMS Experiments With Web-Based Material for Solid Mechanics Courseware and Labs Nationally

工程-机械（56）这个概念验证项目正在开发一个动手和虚拟材料力学实验室模块，该模块使用MEMS光开关来检测微尺寸悬臂梁的弯曲和扭转模式。此外，该项目正在开发基于网络的课程来支持实验室。实验室实验正在以两种方式进行。一种方法是使用最少的设施和设备，这样设备就可以很容易地运输，用于招募大学预科学生的外展项目。另一个使用电子测量和数据采集系统。基于网络的在线虚拟实验室包括一系列必须遵循的步骤来完成实验室。在每一步中，学生们都会被问及关于实验的修辞和分析问题，以加强关于材料力学的特定概念。在线教材的设计是为了通过前后评估过程来衡量学生推理和解决问题能力的增长。学生将被分成控制组，以确定每种方法对学生对材料力学及其在MEMS中的应用的概念发展的影响。MEMS实验项目正在推进对MEMS，半导体材料和特性的认识和理解，以及如何将它们用于开发微传感器件，以研究固体力学，静电学和入门物理学的基本概念。更广泛的影响桑迪亚国家实验室正在与pi合作，帮助开发这种材料。基于网络的材料允许全球访问这些实验，并正在通过会议和出版物进行传播。

Engineering-Mechanical (56) This proof-of-concept project is developing a hands-on and virtual mechanics of materials laboratory module that uses MEMS optical switching to detect flexural and torsional modes in a micro-size cantilever beam. In addition, the project is developing web-based curriculum to support the laboratory. The laboratory experiment is being developed two ways. One method uses minimum facilities and equipment so that the equipment can be easily transported for use in outreach programs to recruit pre-college students. The other uses electronic measuring and data acquisition systems. The on-line web-based virtual laboratory includes a series of steps that must be followed to complete the lab. At each step the students are asked rhetorical and analytical questions about the experiment in order to reinforce a particular concept about mechanics of materials. The online material is being designed so that it can measure the growth of students' reasoning and problem solving skills through a pre-post assessment process. Students are being divided into sets of control groups to determine the effect that each of the methods has on students' conceptual development of mechanics of materials and its applications to MEMS. Intellectual MeritThe MEMS experiments project is advancing the knowledge and understanding about MEMS, semiconductor materials and properties, and how they can be used in developing micro sensing devices to study fundamental concepts in solid mechanics, electrostatics and introductory physics. Broader ImpactSandia National Laboratories is collaborating with the PIs to help develop the material. The web-based materials permits global access to the experiments and are being disseminated through conferences and publications.