Self-Assembled Molecular Nanolayers for Interfacial Isolation in Device Interconnections

本研究的目的是研究自组装分子层作为微器件结构中的界面化学隔离剂，以实现新的高可靠性器件技术。该方法利用有机硅烷纳米层的分子末端和长度的影响来增强薄膜器件界面的化学和结构完整性。在金属-介电薄膜结构的界面处具有有机硅烷纳米层的器件结构将被制造，并用于表征分子末端、长度、多层和横向/层间交联纳米层对诸如杂质引起的漏电流、界面接触电阻率和电容以及界面粘附力等参数的作用。热处理，阶梯覆盖和缺陷，对电性能和化学稳定性的影响，将通过结合电子器件测试与显微镜和光谱技术，开发性能增强和设备故障机制的理解进行研究。这项工作将直接影响未来的器件技术，使自组装结构在传统器件中的使用，并有助于弥合传统微电子技术和新兴的分子器件技术之间的差距。此外，它提供了一个独特的机会，跨学科培训研究生和本科生通过分子自组装，器件制造，测试和材料表征，国际和工业合作的研究。该研究将通过分子层改性器件结构的制造和性能模块整合到纳米结构材料课程中。计划进行实地考察和模块演示，以提高K-12学校学生和科学教师对分子层自组装、性质和应用的认识，并将其纳入科学课程。

The objective of this research is to investigate self-assembled molecular layers as interface chemical isolators in microdevice structures to enable new high-reliability device technologies. The approach is harness the effects of the molecular termini and length of organosilane nanolayers to enhance the chemical and structural integrity of thin film device interfaces. Device structures with the organosilane nanolayers at interfaces of metal-dielectric thin film structures will be fabricated, and used to characterize the roles of molecular termini, length, multilayering, and lateral/interlayer cross-linking nanolayers on parameters such as impurity-induced leakage currents, interface contact resistivity and capacitance, and interfacial adhesion. The effects of thermal treatments, step-coverage and defects, on electrical properties and chemical stability, will be studied by combining electrical device tests with microscopy and spectroscopy techniques, to develop an understanding of property enhancement and device failure mechanisms. This work will directly impact future device technologies by enabling the use of self-assembled structures in conventional devices, and contribute to bridging the gap between conventional microelectronics and emerging molecular device technologies. Additionally, it provides a unique opportunity for cross-disciplinary training to graduate and undergraduate students through research in molecular self-assembly, device fabrication, testing and materials characterization, international and industrial collaborations. The research will be integrated in the Nanostructured Materials course through a module on fabrication and properties of molecular layer-modified device structures. Site-visits and modular presentations are planned to increase the awareness for K-12 school students and science teachers on self-assembly, properties and applications of molecular layers, for integration in their science classes.