Self-Assembled Molecular Nanolayers for Interfacial Isolation in Device Interconnections

用于器件互连中界面隔离的自组装分子纳米层

• 批准号: 0501488
• 负责人: Ganpati Ramanath
• 金额: --
• 依托单位: Rensselaer Polytechnic Institute
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-05-01 至 2008-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0501488&HistoricalAwards=false
• 关键词: Self; Assembled; Molecular; Nanolayers; Interfacial

The objective of this research is to investigate self-assembled molecular layers as interface chemical isolators in microdevice structures to enable new high-reliability device technologies. The approach is harness the effects of the molecular termini and length of organosilane nanolayers to enhance the chemical and structural integrity of thin film device interfaces. Device structures with the organosilane nanolayers at interfaces of metal-dielectric thin film structures will be fabricated, and used to characterize the roles of molecular termini, length, multilayering, and lateral/interlayer cross-linking nanolayers on parameters such as impurity-induced leakage currents, interface contact resistivity and capacitance, and interfacial adhesion. The effects of thermal treatments, step-coverage and defects, on electrical properties and chemical stability, will be studied by combining electrical device tests with microscopy and spectroscopy techniques, to develop an understanding of property enhancement and device failure mechanisms. This work will directly impact future device technologies by enabling the use of self-assembled structures in conventional devices, and contribute to bridging the gap between conventional microelectronics and emerging molecular device technologies. Additionally, it provides a unique opportunity for cross-disciplinary training to graduate and undergraduate students through research in molecular self-assembly, device fabrication, testing and materials characterization, international and industrial collaborations. The research will be integrated in the Nanostructured Materials course through a module on fabrication and properties of molecular layer-modified device structures. Site-visits and modular presentations are planned to increase the awareness for K-12 school students and science teachers on self-assembly, properties and applications of molecular layers, for integration in their science classes.

这项研究的目的是研究自组装的分子层作为微电位结构中的界面化学隔离器，以实现新的高可靠性设备技术。该方法是利用分子末端的影响和有机硅烷纳米层的长度，以增强薄膜设备界面的化学和结构完整性。将制造具有有机硅烷纳米层的装置结构，将制造在金属丝薄膜结构的界面处，并用于表征分子末端，长度，多层，多层和层间/层间纳米层在参数上的作用，例如Ingurity诱发的泄漏电流，互动电流，互动式和能力，并进行了互动。将通过将电气设备测试与显微镜和光谱技术相结合，以发展对属性增强和设备故障机制的理解，从而研究热处理，阶梯覆盖和缺陷对电性能和化学稳定性的影响。这项工作将直接通过在常规设备中使用自组装结构来直接影响未来的设备技术，并有助于弥合常规微电子和新兴分子设备技术之间的差距。此外，通过研究分子自组装，设备制造，测试和材料表征，国际和工业合作的研究，它为跨学科培训提供了一个独特的机会。该研究将通过一个模块将分子层修饰的设备结构的制造和性能整合到纳米结构材料课程中。计划进行现场访问和模块化演示文稿，以提高K-12学校学生和科学教师对分子层的自组装，属性和应用的认识，以在其科学课程中进行整合。