Nanoelectromechanics of Piezoelectric Indentation and Applications to Scanning Probe Microcopies

压电压痕的纳米机电及其在扫描探针显微镜中的应用

• 批准号: 0509936
• 负责人: Mark Kachanov
• 金额: $ 18.06万
• 依托单位: Tufts University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-07-15 至 2008-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0509936&HistoricalAwards=false
• 关键词: Nanoelectromechanics; Piezoelectric; Indentation; Applications; Scanning

Abstract 0509936With the advent of nanoindentation and scanning probe microscopy (SPM) techniques, such as piezoelectric force microscopy, atomic force acoustic microscopy and ultrasonic force microscopy, it has become possible to probe electromechanical properties of materials at the nanoscale. This is critical for the study of microelectromechanical systems, composites and complex oxides (ferroelectrics and piezoelectrics) as well as biomaterials. Ferroelectrics are used in nanoelectromechanical systems as random access memories. Their actual implementation requires the capability to quantitatively probe properties of ferroelectrics at 10nm length scale. However, the lack of quantitative aspects of SPM techniques hinders development of the quantitative imaging of nanoscale electromechanical properties. To propel electromechanical SPMs and nano-indentation techniques to a quantitative characterization tool, the main challenge remains quantitative electromechanics of various tip-surface junctions - the piezoelectric contact mechanics. The investigators in their study are addressing these problems. These results are relevant at hierarchy of length scales, from the millimeter (biological tissues) to the nanometer (bio-applications at the level of cells).

摘要0509936随着纳米压痕和扫描探针显微镜（SPM）技术（例如压接力显微镜、原子力声学显微镜和超声力显微镜）的出现，探测纳米级材料的机电性能已成为可能。 这对于微机电系统、复合材料和复合氧化物（铁电体和压电体）以及生物材料的研究至关重要。 铁电体在纳米机电系统中用作随机存取存储器。 它们的实际实现需要能够在10 nm长度尺度上定量探测铁电体的特性。 然而，SPM技术的定量方面的缺乏阻碍了纳米机电性能的定量成像的发展。 为了推动机电SPM和纳米压痕技术的定量表征工具，主要的挑战仍然是各种尖端表面结的定量机电-压电接触力学。研究人员正在解决这些问题。这些结果与从毫米（生物组织）到纳米（细胞水平的生物应用）的长度尺度的层次有关。