Synthesis and characterization of erbium doped metal oxide photonic materials for optoelectronics application

光电子应用中掺铒金属氧化物光子材料的合成与表征

• 批准号: 0522534
• 负责人: Jane Chang
• 金额: --
• 依托单位: University of California-Los Angeles
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-06-01 至 2010-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0522534&HistoricalAwards=false
• 关键词: Synthesis; characterization; erbium; doped; metal

ABSTRACTPI: Jane P. Chang Institution: University of California - Los AngelesProposal Number: 0522534Title: Synthesis and Characterization of Erbium-Doped Metal Oxide Photonic Materials for Optoelectronics ApplicationsThis research project involves the synthesis of erbium doped metal oxide thin films using an atomic layer deposition (ALD) process with -diketonate precursors to enable the incorporation of a high concentration of optically active erbium ions, while minimizing ion-ion clustering/interactions and maintaining the trivalent state of erbium. Specifically, it aims to study the reaction kinetics in an ALD process leading to a controlled doping of Er3+, implement state-of-the-art surface analytical techniques to elucidate chemical coordination and charge state of erbium as a function of erbium concentration, measure the photoluminescence and determine the absorption cross section for erbium ions, and integrate the synthesized erbium doped materials into micro- to nanometer scaled waveguides to test the optical performance. The success of this work will provide optimized processes for synthesizing optically viable erbium doped metal oxide thin films, and lay the foundation of future generations of more efficient optoelectronic devices.Broad Impact:The broader impact is in the education and training of graduate, undergraduate, and high school summer intern students through engineering courses and hands-on research. Research outcome will be integrated into two courses developed by the PI to maximize the impact of the research, including an undergraduate laboratory course on Semiconductor Manufacturing and a graduate/undergraduate course on Surface and Interface Engineering. Female graduate students will be supported under this program to pursue Ph.D. studies. Senior research projects and summer positions will be offered to undergraduate students, especially women, to work on spectroscopic data collection and analysis to help their long-term career development in academia or industry. Summer internships will also be offered to female high school students through the outreach activities established by the PI to promote their interest in pursuing Science and Engineering when they enter college.

摘要：简·张研究所：加州-洛杉矶大学提案编号：0522534标题：用于光电子应用的掺铒金属氧化物光子材料的合成和表征该研究项目涉及使用原子层沉积（ALD）工艺合成掺铒金属氧化物薄膜，其中使用β-二酮前体以能够掺入高浓度的光学活性铒离子，同时最小化离子-离子聚集/相互作用并保持铒的三价状态。具体而言，其旨在研究ALD工艺中导致Er 3+的受控掺杂的反应动力学，实施最先进的表面分析技术以阐明作为铒浓度的函数的铒的化学配位和电荷状态，测量光致发光并确定铒离子的吸收截面，并将合成的掺铒材料集成到微纳米尺度的波导中以测试光学性能。这项工作的成功将为合成光学可行的掺铒金属氧化物薄膜提供优化的工艺，并为未来几代更高效的光电器件奠定基础。广泛影响：更广泛的影响是通过工程课程和实践研究对研究生，本科生和高中暑期实习生的教育和培训。研究成果将整合到PI开发的两门课程中，以最大限度地发挥研究的影响，包括半导体制造本科实验室课程和表面与界面工程研究生/本科课程。该方案将支持女研究生攻读博士学位。问题研究高级研究项目和暑期职位将提供给本科生，特别是女性，从事光谱数据收集和分析工作，以帮助他们在学术界或工业界的长期职业发展。还将通过公共政策研究所开展的外联活动向女高中生提供暑期实习机会，以提高她们进入大学后对科学和工程专业的兴趣。