CAREER: Plasma and Surface Chemistry in Depositing and Etching Metal Oxides

职业：金属氧​​化物沉积和蚀刻中的等离子体和表面化学

• 批准号: 9985511
• 负责人: Jane Chang
• 金额: $ 23万
• 依托单位: University of California-Los Angeles
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-04-01 至 2005-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9985511&HistoricalAwards=false
• 关键词: CAREER; Plasma; Surface; Chemistry; Depositing

Understanding of complex plasma-chemical processes has enabled many technological breakthroughs for thin-film deposition, etching, surface cleaning, and surface modification in silicon-based microelectronic systems. The objective of this CAREER effort is to extend plasma processing technology to metal oxides, a nonsilicon class of dielectric materials, by elucidating the gas-phase and surface reaction mechanisms and the origins of electronic defects in metal-oxide thin films and their effects on the conduction mechanisms of these films. Plasma diagnostic and surface analytical techniques are used to obtain quantitative information on plasma chemistry, identify reaction intermediates, and determine surface reaction-rate coefficients needed to model and control deposition and etching processes under real processing conditions. Scanning tunneling microscopy is used to determine local surface electronic structure and point defects during initial growth of the ultrathin dielectrics.An undergraduate semiconductor manufacturing option is to be established featuring a Semiconductor Manufacturing and Micro-Fabrication Laboratory to give chemical engineering students hands-on experience in fabricating and testing miniature electronic devices and micro-electrical mechanical systems (MEMS).

对复杂等离子体化学过程的理解使得硅基微电子系统中的薄膜沉积、蚀刻、表面清洁和表面改性的许多技术突破成为可能。 这个职业生涯的努力的目标是扩展等离子体处理技术的金属氧化物，非硅类介电材料，通过阐明气相和表面反应机制和金属氧化物薄膜中的电子缺陷的起源及其对这些薄膜的导电机制的影响。 等离子体诊断和表面分析技术用于获得等离子体化学的定量信息，识别反应中间体，并确定在真实的处理条件下建模和控制沉积和蚀刻工艺所需的表面反应速率系数。 利用扫描隧穿显微镜来确定晶体管初始生长过程中的局部表面电子结构和点缺陷。本科生半导体制造选项将建立一个半导体制造和微制造实验室，为化学工程专业的学生提供制造和测试微型电子器件和微机电系统（MEMS）的实践经验。