SST: Damage-Tolerant, Stretchable, and Reconfigurable Silicon-based Piezoelectric Sensor Networks For Structural and Medical Diagnostic Imaging

SST：用于结构和医学诊断成像的耐损伤、可拉伸和可重构的硅基压电传感器网络

• 批准号: 0529357
• 负责人: Peter Peumans
• 金额: $ 40万
• 依托单位: Stanford University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0529357&HistoricalAwards=false
• 关键词: SST; Damage; Tolerant; Stretchable; Reconfigurable

0529357Peter Peumans & Fu-Kao ChangStanford UniversityThis project is to realize very dense and cost-effective networks of high-performance sensors deployable on the centimeter to meter-scale. The networks are entirely processed in a CMOS foundry before they are "stretched" to the target size and "cut" to the right shape. An innovative layout and deep reactive ion etching to fabricate stretchable sensor networks starting with foundry-processed silicon wafers are used. Each of the sensor network nodes is a small (~50-200mm diameter), high-performance silicon integrated circuit that houses a sensor, sensor interface, local processor, and a network interface. The stretching ability of the network is achieved by realizing the network and power connections as standard CMOS interconnects on narrow silicon ridges configured as springs. The sensor networks are damage tolerant, scalable, reconfigurable, cost-effective and durable. The testbed will be an ultrasonic sensor/transducer network integrated into a composite laminate structure to sense incipient damage with unprecedented spatial and temporal resolution. Further applications are high-resolution ultrasound medical imaging, guided chemotherapy by ultrasound-induced hyperthermia, and microwave phased arrays for homeland security.The proposed techniques can be applied not only on composite structures in aero/astro/auto/civil applications, but also metallic structures for monitoring fatigue cracks in remote hot spot areas. The proposed integrated multi-disciplinary research among electrical engineering and structural mechanics provides a great opportunity for students engaging in this research to communicate and interact with each other across disciplines. The planned research will be integrated into the courses taught by the participating investigators. Interactions with both industry and high school students are an integral part of the proposal, as well as an "Engineering-as-Art" initiative.This is a project under the sensor initiative NSF 05-526.

0529357 Peter Peumans&Amp；Fu-Kao张斯坦福大学这个项目是为了实现非常密集且经济高效的高性能传感器网络，这些传感器可以部署在厘米级到米级级。这些网络在被“拉伸”到目标尺寸和“切割”到合适的形状之前，完全在一家cmos铸造厂进行加工。采用了一种创新的布局和深度反应离子刻蚀，从铸造工艺的硅片开始制造可伸缩的传感器网络。每个传感器网络节点都是一个小(直径约50-200 mm)的高性能硅集成电路，其中包含一个传感器、传感器接口、本地处理器和一个网络接口。网络的扩展能力是通过将网络和电源连接实现为配置为弹簧的窄硅脊上的标准CMOS互连来实现的。传感器网络具有容损性、可伸缩性、可重构性、高性价比和耐用性。试验台将是一个集成到复合材料层板结构中的超声波传感器/换能器网络，以前所未有的空间和时间分辨率检测早期损伤。该技术不仅可应用于航空/航天/汽车/民用复合材料结构，还可用于监测偏远热点区域的金属结构疲劳裂纹。电气工程与结构力学相结合的多学科综合研究为从事这一研究的学生提供了一个跨学科交流和互动的好机会。计划中的研究将整合到参与研究人员教授的课程中。与工业界和高中生的互动是提案中不可或缺的一部分，也是“工程即艺术”倡议的一部分。这是传感器倡议NSF 05-526下的一个项目。