SIRG/Collaborative Research: Distributed Subwavelength Micro Photonic Sensors for In-situ Monitoring with High Spatial and Temporal Resolution in Manufacturing Environments

SIRG/合作研究：分布式亚波长微光子传感器，用于制造环境中具有高空间和时间分辨率的原位监控

• 批准号: 0529444
• 负责人: David Dornfeld
• 金额: $ 26.96万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-10-01 至 2008-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0529444&HistoricalAwards=false
• 关键词: SIRG; Collaborative; Research; Distributed; Subwavelength

The objective of this Sensors and Sensor Networks (NSF 05-526), Sensors Interdisciplinary Research Group (SIRG) project is to conduct fundamental investigations towards the implementation of novel subwavelength microphotonic sensors for applications in manufacturing environments by studying the fundamental limits in the spatial and temporal resolutions of these sensors, developing innovative embedding techniques, and testing sensors in real manufacturing processes. Specifically, the research group will study the fundamental limit in the spatial and temporal resolution of integrated microphotonic sensors for temperature and strain measurements. Microphotonic sensors will be embedded into metals to ensure sensor survivability and reliability in manufacturing environments. An innovative batch fabrication of metal embedded subwavelength microphotonic sensors will be developed. Techniques will be studied and optimized for transferring metal embedded microphotonic sensors into larger metallic structures in manufacturing environments. The research group also seeks to implement these sensors in real manufacturing testbeds and utilize sensing data to achieve a better fundamental understanding of two important processes, chemical mechanical planarization for semiconductor manufacturing and continuous casting for steel production.If successful, this research will significantly advance sensor technologies through an interdisciplinary study of subwavelength photonic sensors, sensor embedding into metals, and sensing in real manufacturing processes. Novel sub-wavelength microphotonic sensors along with innovative embedding techniques will yield measurements with high spatial resolution, high sensitivity, and fast temporal response. The success of this project can significantly advance fundamental knowledge for chemical mechanical planarization and continuous casting of steel processes. The successful implementation of microphotonic sensor arrays could advance the fundamental understanding of numerous other manufacturing processes, thus significantly improving productivity and generating significant cost savings. Industrial testbeds will facilitate immediate technology transfer to industry, in addition to planned publications, short courses to industry, and patents. Undergraduate and graduate students will be able to get hands-on experience in subwavelength microphotonic technology. Summer workshops will be held and suitable science modules will be developed for K12 students and teachers. The PIs will also attract, retain, and engage students from under-represented groups.

传感器和传感器网络（NSF 05-526），传感器跨学科研究小组（sisig）项目的目标是通过研究这些传感器的空间和时间分辨率的基本限制，开发创新的嵌入技术，以及在实际制造过程中测试传感器，对用于制造环境的新型亚波长微光子传感器的实施进行基础研究。具体来说，研究小组将研究用于温度和应变测量的集成微光子传感器的空间和时间分辨率的基本限制。微光子传感器将嵌入金属中，以确保传感器在制造环境中的生存能力和可靠性。将开发一种创新的批量制造金属嵌入亚波长微光子传感器的方法。将研究和优化将金属嵌入微光子传感器转移到制造环境中更大的金属结构的技术。该研究小组还寻求在真实的制造试验台中实施这些传感器，并利用传感数据来更好地理解两个重要过程，半导体制造的化学机械平面化和钢铁生产的连铸。如果成功，这项研究将通过亚波长光子传感器、嵌入金属的传感器和真实制造过程中的传感等跨学科研究，显著推进传感器技术的发展。新型亚波长微光子传感器以及创新的嵌入技术将产生高空间分辨率、高灵敏度和快速时间响应的测量结果。该项目的成功可以大大提高化学机械平面化和连铸钢工艺的基础知识。微光子传感器阵列的成功实施可以促进对许多其他制造工艺的基本理解，从而显着提高生产率并产生显着的成本节约。工业试验台将促进立即向工业转移技术，此外还计划出版出版物、向工业提供短期课程和专利。本科生和研究生将能够获得亚波长微光子技术的实践经验。我们将举办夏季工作坊，并为K12学生和教师开发合适的科学模块。pi还将吸引、留住和吸引来自代表性不足群体的学生。