Gas Phase NanoWire Integration Process

这笔赠款提供资金，用于开发在表面上集成纳米线的气相工艺。该方法是安装和表征一个双重反应器系统，用于在受控条件下原位形成种子颗粒(反应器1)和纳米线生长(反应器2)。反应堆将与气相处理系统相连，以将种子颗粒传输和沉积到目标晶片上。这些线材将在高温下生长，并将其形态、成分和取向与基于溶液的生长方法进行比较。这一提议的智力优点是展示和促进了对旨在在表面可寻址区域集成纳米线的新型原位气相集成工艺的了解。拟议的集成系统将为使用尺寸分类的种子颗粒形成的纳米线的直径极限提供答案。目前存在的达到这种效果的方法很少，而且都存在问题。因此，这项工作的每一个要素都可能产生巨大的影响。种子颗粒可以在气相中产生，在那里它们可以使用成熟的方法进行处理。在任意衬底上定位任意材料的纳米线的能力可以使基于其他不兼容材料的技术合并。在单个衬底上集成不同的基于纳米材料的器件的能力将减少互连的长度，反过来，器件和系统的性能将得到改善，实现所需系统所需的工艺步骤应该更少。因此，根据这一提议制定的方法和过程可能对纳米技术的总体进步产生重大影响。

This grant provides funding to develop a gas phase process to integrate nanowires on surfaces. The approach is to install and characterize a dual reactor system for the insitu formation of seed particles (reactor 1) and nanowire growths (reactor 2) under controlled conditions. The reactors will be connected with a gas phase handling system to transport and deposit seed particles onto the target wafer. The wires will be grown at elevated temperatures and the morphology, composition, and orientation will be compared with solution based growth methods. The intellectual merit of this proposal is to demonstrate and advance knowledge of novel insitu gas phase integration processes that aim at integrating nanowires at addressable regions on a surface. The proposed integration system will provide answers on the ultimate limit in the diameters of the nanowires that can be formed using size classified seed particles. Few methods to this effect currently exist and are all afflicted with their problems. Hence, each element of this work could have tremendous impact. Seed particles could be created in the vapor phase, where they could be processed using well established methods. The ability to localize nanowires of arbitrary materials on arbitrary substrates could allow the merging of technologies based on otherwise incompatible materials. The ability to integrate different nanomaterial based devices on a single substrate will reduce the lengths of interconnects, in turn, devices and systems performance would improve and less processing steps should be required to realize a desired system. The methods and processes developed under this proposal may thus have a significant impact on the progress of nanotechnology in general.