SGER: Actuators for Angstrom-scale Movement of Micromachined Devices

SGER：用于微机械设备埃级运动的执行器

• 批准号: 0631241
• 负责人: Joseph Talghader
• 金额: --
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-06-01 至 2007-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0631241&HistoricalAwards=false
• 关键词: SGER; Actuators; Angstrom; scale; Movement

Actuators for Angstrom-scale Movement of micromachined devices(Joseph Talghader)The objective of this proposal is to demonstrate electrostatic actuation capable ofangstrom-level control of nanometer-scale air gaps between micron- to millimeter-sized flat semiconductor surfaces. To achieve this, wedge actuators using micromachined- and bulk cantilevers will be fabricated using silicon and InGaAs/InP materials. Initially, the actuators will be configured with electrodes across the entire structure to test the general shape across the structures. Subsequent structures will have actuation electrodes and gap testing electrodes separated, with the actuation electrodes separated with a larger gap. Intellectual Merit:A successful completion of the program will be the demonstration of angstrom levelcontrol as measured using either interferometry, electrical tunneling between electrodes separatedby a nanometer-scale gap, or shifts in the peak wavelength of the photoluminescence across thewedge. Moving micron- to millimeter-sized structures over atomic distance scales is one of the major challenges in the advance of nanotechnology. Control at this level would enable many nanomechanical devices such as those where one changes the gap between quantum barriers to adjust the position of electron states. Broader Impact Current semiconductor light emitters and detectors have tunability limited to roughly 10% of their fundamental emission frequency. Electron quantum state control could extend the tuning of interband transitions to 30% and intersubband transitions to nearly their fundamental limits dictated by band offsets and thermal broadening. This one-year program encompasses theoretical, experimental, and design work, which makes it ideal for training graduate students and advanced undergraduates. In addition, the program may also include research opportunities for one or more high school students through a Mentor program in one of the local school districts of the Twin Cities area. There are several available educational programs at Minnesota, which will be used to recruit undergraduate participants in the research including an NSF-funded REU program for underrepresented and small college students, an Undergraduate Research Opportunities Program (UROP), and a departmental Senior Honors Program.

微机械设备的埃级运动的致动器（约瑟夫Talghader）本提案的目的是证明静电致动能够ofangstrom级控制微米至毫米级的平面半导体表面之间的纳米级空气间隙。为了实现这一目标，楔形执行器使用微机械和散装杠杆将使用硅和InGaAs/InP材料制造。 最初，致动器将被配置有跨整个结构的电极，以测试跨结构的一般形状。后续结构将具有分离的致动电极和间隙测试电极，其中致动电极以较大间隙分离。智力优势：该计划的成功完成将是埃级控制的示范，使用干涉测量法，纳米级间隙分离的电极之间的电隧道，或光致发光峰值波长跨越楔形物的位移来测量。在原子距离尺度上移动微米到毫米尺寸的结构是纳米技术进步的主要挑战之一。在这个水平上的控制将使许多纳米机械设备，如那些改变量子势垒之间的差距以调整电子状态位置的设备。更宽的冲击电流半导体光发射器和检测器的可调谐性限制在其基本发射频率的大约10%。电子量子态控制可以扩展调谐带间跃迁到30%和子带间跃迁到几乎其基本限制所规定的带偏移和热加宽。 这个为期一年的计划包括理论，实验和设计工作，这使得它非常适合培养研究生和高级本科生。此外，该计划还可能包括一个或多个高中学生通过导师计划在双城地区的当地学区之一的研究机会。明尼苏达州有几个可用的教育计划，将用于招募研究中的本科生参与者，包括NSF资助的REU计划，用于代表性不足和小型大学生，本科生研究机会计划（UROP）和部门高级荣誉计划。