Large-area Chemical, Biological, and Materials NanoManufacturing

这项研究的重点是开发一种简单、廉价的平台，在晶片大小的区域上形成软硬纳米材料的图案。这项工作的大部分利用了软纳米光刻技术的进步，以及带有纳米孔的自由漂浮和灵活的金掩模，在纳米级上对化学、生物和无机材料进行了构图。这些纳米制造方法可以并行地获得小于100 nm的图案，在几平方英寸上具有小于100 nm的间隔。多尺度和纳米尺度的图案由母版简单地确定。这一新的软纳米制造平台的成果将推动科学前景，例如用于多路复用化学和生物传感的体系结构，以及用于直接与基于芯片的工艺集成的独特的杂化等离子体纳米材料。这项工作的教育和推广目标集中在将纳米制造研究整合到课堂上。在国内，将开展三项工作：(1)由国家科学基金会-纳米技术本科教育奖(http://www.nanoed.org/courses/nano_experiments_menu.html)；的实验模块)赞助的一年级和二年级的纳米技术研究型课程；(2)为国家科学基金会-国家纳米科学与工程学习与教学中心的一个自组装/纳米技术工作组贡献内容；(3)举办纳米技术公共讲座，并进行现场演示。在国际上，将继续领导实践纳米技术讲习班，例如在非洲材料研究会(2007年)举办的讲习班。在这里，教授和学生学习了基于CD和软光刻的台式纳米刻蚀实验。

This research focuses on the development of a simple and inexpensive platform to pattern soft and hard nanoscale materials over wafer-sized areas. The majority of this work exploits advances in soft nanolithography and free-floating and flexible gold masks perforated with nanoholes to pattern chemical, biological, and inorganic materials at the nanoscale level. These nanomanufacturing methods can achieve, in parallel, sub-100 nm patterns with sub-100 nm separations over several square inches. The multi-scale and nanoscale patterns are simply determined by the master. The outcomes of this new soft nanomanufacturing platform will drive scientific prospects, such as architectures for multiplexed chemical and biological sensing and unique hybrid plasmonic nanomaterials for direct integration with chip-based processing.The educational and outreach goals of this work focus on integrating nanofabrication research into the classroom. Domestically, three efforts will be carried out: (1) research-based courses on nanopatterning for freshmen and sophomores sponsored by an NSF-Nanotechnology in Undergraduate Education award (lab modules for the experiments at http://www.nanoed.org/courses/nano_experiments_menu.html); (2) contributing content to a self-assembly/nanopatterning working group as part of the NSF-National Center for Learning and Teaching in Nanoscale Science and Engineering; and (3) delivery of public lectures on nanotechnology that also involve live demonstrations. Internationally, the leading of hands-on nanotechnology workshops such as the one at the African Materials Research Society (2007) will continue. Here, professors and students were taught benchtop nanopatterning experiments based on CDs and soft lithography.