Large-area Chemical, Biological, and Materials NanoManufacturing

这项研究的重点是开发一种简单而廉价的平台，在晶圆大小的区域上对软硬纳米级材料进行图案设计。这项工作主要利用了软纳米光刻技术和自由浮动的柔性金掩膜，这些掩膜上穿孔有纳米孔，可以在纳米尺度上对化学、生物和无机材料进行图案设计。这些纳米制造方法可以并行地在几平方英寸的范围内实现亚100纳米的图案和亚100纳米的分离。多尺度和纳米尺度的图案只是由主人决定的。这种新型软纳米制造平台的成果将推动科学前景，例如用于多路化学和生物传感的架构，以及用于直接集成芯片处理的独特混合等离子体纳米材料。这项工作的教育和推广目标集中在将纳米制造研究整合到课堂上。在国内，将开展三方面的工作：(1)由美国国家科学基金会纳米技术本科教育奖资助的一、二年级纳米图案研究型课程（实验模块在http://www.nanoed.org/courses/nano_experiments_menu.html）；(2)作为nsf -国家纳米科学与工程学习与教学中心的一部分，为自组装/纳米图案工作组提供内容；(3)提供关于纳米技术的公开讲座，其中也包括现场演示。在国际上，像非洲材料研究学会（2007）那样的纳米技术实践研讨会将继续领导。在这里，教授和学生们进行了基于cd和软光刻的台式纳米图案实验。

This research focuses on the development of a simple and inexpensive platform to pattern soft and hard nanoscale materials over wafer-sized areas. The majority of this work exploits advances in soft nanolithography and free-floating and flexible gold masks perforated with nanoholes to pattern chemical, biological, and inorganic materials at the nanoscale level. These nanomanufacturing methods can achieve, in parallel, sub-100 nm patterns with sub-100 nm separations over several square inches. The multi-scale and nanoscale patterns are simply determined by the master. The outcomes of this new soft nanomanufacturing platform will drive scientific prospects, such as architectures for multiplexed chemical and biological sensing and unique hybrid plasmonic nanomaterials for direct integration with chip-based processing.The educational and outreach goals of this work focus on integrating nanofabrication research into the classroom. Domestically, three efforts will be carried out: (1) research-based courses on nanopatterning for freshmen and sophomores sponsored by an NSF-Nanotechnology in Undergraduate Education award (lab modules for the experiments at http://www.nanoed.org/courses/nano_experiments_menu.html); (2) contributing content to a self-assembly/nanopatterning working group as part of the NSF-National Center for Learning and Teaching in Nanoscale Science and Engineering; and (3) delivery of public lectures on nanotechnology that also involve live demonstrations. Internationally, the leading of hands-on nanotechnology workshops such as the one at the African Materials Research Society (2007) will continue. Here, professors and students were taught benchtop nanopatterning experiments based on CDs and soft lithography.