Development of High Power Microwave Plasma Enhanced Chemical Vapor Deposition System for High Speed Large Area Synthesis of Diamond and Graphene

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This project aims to develop new research partnership between Dr. Yang at the University of Saskatchewan and Plasmionique Inc. to address the problems of coupling high power microwave into large chemical vapor deposition (CVD) systems to enable large area and high speed synthesis of high quality diamond sheets and graphene. Dr. Yang has been working on CVD synthesis and characterization of diamond for thirty years and her team has successfully developed many innovative techniques to synthesize diamond, carbon nanotubes, graphene, graphene, and other carbon nanostructures with superior properties on various substrate materials for a wide range of applications. On the other hand, Plasmionique has been developed various types of plasma enhanced CVD systems. The company is the first and only supplier of microwave plasma enhanced CVD systems in Canada and the major supplier of other types of plasma enhanced vapor deposition systems in the world. It is evident that the development of partnership between Dr. Yang's group and the Company would produce strong synergy for the economic benefit of Canada, which will be enormous as both the reactor and synthesis techniques developed can be directly delivered to the market to make full use of the unique and outstanding properties of diamond and graphene for various industrial and biomedical applications. The environmental and social impact would be more significant as the developed new reactors and the new processes will enable large area high speed synthesis of diamond and other carbon materials, which will enable more efficient solar cells, more efficient tools, novel electron emission sources, much improved biomedical implants, and wear and corrosion resistant components for various structures and systems, and thus minimizing pollution and wastage and improving life quality.