Shrinkable and Stretchable NanoManufacturing

可收缩和可拉伸的纳米制造

• 批准号: 1069180
• 负责人: Teri Odom
• 金额: $ 30万
• 依托单位: Northwestern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2015-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1069180&HistoricalAwards=false
• 关键词: Shrinkable; Stretchable; NanoManufacturing

This award provides funding for the development of a new nanofabrication strategy: shrinkable and stretchable nanomanufacturing. These low-cost and scalable nanomanufacturing tools are based on thermoplastic materials and molding techniques. The research focuses on using thermoplastic materials in programmable soft lithography to determine the lower limits (shrinkable) and upper limits (stretchable) of large-area nanopatterns that can be fabricated starting from one master pattern. The production of hierarchical and low-symmetry lattice patterns beginning with a periodic lattice master will also be investigated. Ultimately, the goal of these new tools is to achieve 10-nm resolution in both feature sizes and lattice spacing using multiple cycles of shrinking and molding over wafer-scale areas.If successful, this work will address two major challenges in nanomanufacturing: (1) prototyping and scaling of nanoscale patterns; and (2) reducing the processing and materials cost of fabrication. The planned strategy can overcome both problems while introducing a roadmap for how nanofabrication can be carried out in the future for periodic and ordered nanostructures. Importantly, the key factors only depend on readily available polymers and molding methods having a pre-existing infrastructure. Molding eliminates the need for a light source and can, in principle, access sub 10-nm features. Also, since thermoplastic substrates are already processed in industry (e.g. shrink-wrapped vehicles), the planned nanomanufacturing strategy can be directly integrated in current settings to reduce overall life cycle costs.

该奖项为开发一种新的纳米纤维战略提供资金：可收缩和可拉伸的纳米制造。这些低成本和可扩展的纳米制造工具基于热塑性材料和成型技术。该研究的重点是在可编程软光刻中使用热塑性材料，以确定可以从一个主图案开始制造的大面积纳米片的下限（可收缩）和上限（可拉伸）。生产的层次和低对称性的晶格图案开始与周期性的晶格主也将进行调查。最终，这些新工具的目标是通过在晶圆级区域上进行多次收缩和成型，在特征尺寸和晶格间距方面实现10 nm的分辨率。如果成功，这项工作将解决纳米制造中的两个主要挑战：（1）纳米级图案的原型和缩放;（2）降低制造的加工和材料成本。计划中的策略可以克服这两个问题，同时为未来如何进行周期性和有序的纳米结构的纳米制造提供了路线图。重要的是，关键因素仅取决于现成的聚合物和具有预先存在的基础设施的成型方法。成型消除了对光源的需要，并且原则上可以访问10 nm以下的特征。此外，由于热塑性基材已经在工业中加工（例如收缩包装车辆），因此计划的纳米制造策略可以直接集成到当前环境中，以降低整体生命周期成本。