High Throughput Manufacturing of Nanolaminates

该研究奖的目的是开发高通量制造工艺，以有效生产多层纳米层压材料。低频（~ 1Hz）脉冲等离子体增强化学气相沉积（PECVD）已被设计为原子层沉积的替代方案，用于金属氧化物的自限制生长（即1 μ m/脉冲）。脉冲PECVD具有许多优点，包括高净速率（30 nm/min），更大的工艺窗口以及对大量前体/材料的广泛适用性。拟议的工作旨在实现两个主要目标。第一个将是与混合金属氧化物纳米层压材料的形成相关联的界面问题的检查。第二，氧化物的脉冲PECVD合成将通过相同的方法与聚合物的自限制沉积集成以形成无机/有机纳米层压材料。丙烯酸酯和硅酮基聚合物的目标是将纳米层压制造扩展到柔性聚合物基板阵列。 如果成功的话，这种工艺技术有望影响纳米层压材料的制造，用于许多应用，包括高性能电子器件，光学元件和柔性电子器件的扩散屏障。一个强大的方法来合成高品质的有机/无机纳米层压材料将是一个使技术具有广泛的交叉潜力。这项工作的更广泛影响还将包括培养一名博士候选人，并让本科生研究人员参与具有重大技术意义的领域。这项工作所产生的材料和专业知识将被纳入现有的硅加工实验室课程和等离子体加工的研究生选修课。PI和他的学生将与科罗拉多矿业学校K-12外展团队合作，为贫困和少数民族学生众多的学区开发光学、等离子体和光化学领域的教师研讨会材料。

The objective of this research award is to develop high throughput manufacturing processes for the efficient production of multi-layer nanolaminates. Low frequency (~1 Hz) pulsed plasma-enhanced chemical vapor deposition (PECVD) has been engineered as an alternative to atomic layer deposition for self-limiting growth of metal oxides (i.e. 1 Å/pulse). Pulsed PECVD offers a number of benefits including high net rates ( 30 nm/min), a larger process window, and wide applicability to a large number of precursors / materials. The proposed work is directed at accomplishing two major goals. The first will be an examination of interfacial issues associated with the formation of mixed metal oxide nanolaminates. Second, pulsed PECVD synthesis of oxides will be integrated with self-limiting deposition of polymers by the same method to form inorganic/organic nanolaminates. Acrylate and silicone based polymers are targeted to extend nanolaminate manufacturing to an array of flexible polymer substrates. If successful this process technology is expected to impact the manufacturing of nanolaminates for numerous applications, including high performance dielectrics, optical components, and diffusion barriers for flexible electronics. A robust approach to the synthesis of high quality organic/inorganic nanolaminates will be an enabling technology with broad cross-cutting potential. The broader impacts of this work will also include the training of a PhD candidate and the engagement of undergraduate researchers in areas of great technological importance. The materials and expertise produced by this work will be incorporated into an existing silicon processing lab course and a graduate elective in plasma processing. The PI and his students will work with the Colorado School of Mines K-12 outreach team, developing teacher workshop materials in the areas of optics, plasmas, and photovoltaics for school districts with large populations of poor and minority students.