High Temperature Electronic Devices Based on Wide Bandgap Thin Films

本研究的目的是合成和表征适合于制造高温电子器件的高电阻率未掺杂和半导体p和n掺杂多晶金刚石和AlN薄膜，并研究在硅器件不适用的情况下制造高温微电子器件。该方法由微波等离子体增强化学气相沉积法合成金刚石薄膜和测量其电学和力学性能组成。研究了工艺参数对薄膜的组成、晶体质量、机械强度和电性能的影响。先进的材料表征技术将用于表征纳米级微观结构，这将关系到薄膜的性能。电性能，如I-V和C-V行为和载流子浓度将在一定温度范围内测量。年轻吗?s模量将在现有的迈克尔逊干涉仪系统上测量。器件的制造，如肖特基二极管，压力传感器和电压倍增器堆栈将被研究。在更广泛的范围内，这项研究有潜力为飞机、航天器、汽车和核反应堆开发500摄氏度以上的电子设备，从而降低发动机维护成本，提高可靠性和性能效率，从而带来巨大的回报。这项研究的一个基本和重要组成部分将是提供研究生、博士后和大四本科生的教育和培训。此外，少数民族/女性和高中生将通过我们大学的项目接受指导并接触到这项研究。建议向高中大力推广。

The objectives of this research are to synthesize and characterize thin films of high resistivity undoped, and semi-conducting p- and n-doped polycrystalline diamond and AlN thin films suitable for the fabrication of high temperature electronic devices, and to investigate the fabrication of high temperature microelectronic devices where silicon devices are not useful. The approach consists of synthesis of diamond films by microwave plasma enhanced chemical vapor deposition and measurement of their electrical and mechanical properties. The influence of process parameters on the composition, crystal quality, mechanical strength, and the electrical properties of the films will be studied. Advanced materials characterization techniques will be used to characterize nanoscale microstructure, which will be related to the properties of the films. Electrical properties such as I-V and C-V behaviors and carrier concentration will be measured over a range of temperatures. Young?s moduli will be measured on existing Michelson interferometer system. Fabrication of devices such as Schottky diodes, pressure sensor, and a voltage multiplier stack will be investigated. On a broader scale, the proposed research has potentials for enormous payoffs by developing electronics for operation above 500oC for aircraft, spacecraft, automobiles and nuclear reactors thereby reducing engine maintenance costs, and improving reliability and performance efficiencies. An essential and important component of this research will be to provide education and training of graduate students, post-docs, and undergraduate seniors. In addition, minority/women and high school students will be mentored and exposed to this research through programs at our university. A significant outreach to high schools is proposed.