Vibration-Insensitive and Large-Range MEMS Scanning Fourier Transform Spectroscopy for Portable Chemical/BioSensors

适用于便携式化学/生物传感器的振动不敏感和大范围 MEMS 扫描傅立叶变换光谱

• 批准号: 0901711
• 负责人: Huikai Xie
• 金额: $ 37.33万
• 依托单位: University of Florida
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-06-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0901711&HistoricalAwards=false
• 关键词: Vibration; Insensitive; Large; Range; MEMS

NSF # 0901711: Tilting-Insensitive MEMS Scanning Fourier Transform Spectroscopy for Portable Chemical/BioSensorsPIs: Huikai Xie; Fan Ren (University of Florida)The objective of this research is to develop miniature infrared (IR) spectrometers for portable or handheld chemical/biosensors. The approach is to use novel micro-electro-mechanical system (MEMS) techniques to miniaturize the mirror scanning mechanism and the IR detector. A unique interferometer design is also proposed to compensate mirror tilting.Fourier transform spectroscopy, especially in infrared range, or FTIR, is very powerful in chemical/biosensing. However, most of FTIR systems are bulky and expensive. MEMS technology has been used to miniaturize FTIR systems, but researchers still face several challenges: low spectral resolution due to small displacements of the MEMS mirrors; tilting of scanning MEMS mirrors; and lack of small-sized uncooled IR detectors for FTIR. This research will address these challenges with several innovative techniques: a new MEMS mirror whose scan range will reach over 1 mm that is 10?e improvement compared to its counterparts; a single-mirror Michelson interferometer design capable of tilt-insensitive scanning; and a capacitive MEMS uncooled IR detector that is small, inexpensive and highly-sensitive. The proposed integrated technology has a broad range of applications including homeland security, antiterrorism, food safety, and environmental monitoring. Due to their small size and low cost, such devices can be used onsite by first responders such as soldiers or border guards, so that explosives, chemical weapons, toxic hazards and biological agents can be identified quickly to prevent or minimize damage and save lives. Through this project, efforts will be made to attract more young students especially minority students into engineering and science areas.

NSF # 0901711：用于便携式化学/生物传感器的倾斜不敏感MEMS扫描傅里叶变换光谱学PI：Huikai Xie; Fan Ren（佛罗里达大学）本研究的目标是开发用于便携式或手持式化学/生物传感器的微型红外（IR）光谱仪。该方法是使用新的微机电系统（MEMS）技术来实现镜扫描机构和红外探测器。傅里叶变换光谱学，特别是红外光谱，或FTIR，在化学/生物传感中是非常强大的。然而，大多数FTIR系统体积庞大且昂贵。MEMS技术已被用于简化FTIR系统，但研究人员仍然面临着几个挑战：由于MEMS反射镜的小位移导致的低光谱分辨率;扫描MEMS反射镜的倾斜;以及缺乏用于FTIR的小尺寸非制冷IR探测器。这项研究将解决这些挑战与几个创新的技术：一个新的MEMS镜，其扫描范围将达到超过1毫米，这是10？e的改进相比，其同行;一个单镜迈克尔逊干涉仪的设计，能够倾斜不敏感扫描;和电容MEMS非制冷红外探测器，是小，廉价和高灵敏度。拟议的集成技术具有广泛的应用，包括国土安全，反恐，食品安全和环境监测。由于体积小、成本低，这些装置可由士兵或边防警卫等第一反应人员在现场使用，以便迅速识别爆炸物、化学武器、有毒危险物和生物制剂，以防止或尽量减少损害并拯救生命。通过这个项目，将努力吸引更多的年轻学生，特别是少数民族学生进入工程和科学领域。